An s-SNOM subsurface defect fine imaging method and
system based on polarization
laser scattering guidance belong to the technical field of optical
nondestructive testing, and are realized based on a
laser, a
polarizer, a polarization modulator, a sample to be tested, an optical splitter array, an analyzer array and a
detector which are sequentially arranged along the
laser propagation direction, and the sample to be tested comprises subsurface defects. Firstly, a to-be-detected sample is subjected to polarization scattering
rapid detection to obtain polarization scattering data; secondly, performing quantitative analysis and
risk assessment on the non-uniformity of the subsurface structure to obtain a
region of interest; thirdly, performing region-of-interest extraction and detection task scheduling on the high-risk region; and finally, performing high-resolution near-field scanning imaging on the
region of interest. On the basis of keeping the
advantage of s-SNOM high-resolution imaging, cross-scale cooperation between polarization scattering information and near-field imaging can be realized by introducing a rapid and effective prior guiding mechanism, and efficiency and precision are both considered in large-area sample detection.