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Method for making multi-crystal Hg iodide film room temperature nucleus emission detector

A nuclear radiation detector and mercury iodide technology are applied in the field of preparation of X-ray and γ-ray room temperature nuclear radiation detectors, which can solve the problem of reducing the temperature of growth, affecting the deposition speed and quality of thin films, and large stress on thin films and substrates. problem, to achieve the effect of simple process, low preparation cost and easy operation

Inactive Publication Date: 2008-09-10
SHANGHAI UNIV
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  • Application Information

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Problems solved by technology

In the process of physical vapor deposition, if the growth temperature of the film is too high, although a large growth rate can be obtained, it will also cause excessive stress on the film and the substrate and reduce the bonding force; if the growth temperature is too low, it will affect the growth of the film. speed and quality
Therefore, in order to obtain a better combination between the film and the substrate and reduce the stress between them, the growth temperature must be reduced, which will affect the speed and quality of film deposition.

Method used

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  • Method for making multi-crystal Hg iodide film room temperature nucleus emission detector
  • Method for making multi-crystal Hg iodide film room temperature nucleus emission detector
  • Method for making multi-crystal Hg iodide film room temperature nucleus emission detector

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Embodiment 1

[0023] The process and steps of the polycrystalline mercury iodide film room temperature nuclear radiation detector in this embodiment are as follows:

[0024] (1) The crystal grains prepared on the conductive glass substrate are columnar, and the crystal grain direction belongs to (001) crystal plane type polycrystalline mercury iodide film with a size of 2 inches * 2 inches. Mechanical rough polishing is performed on the film with leather paper to make the surface of the crystal grains smooth without obvious grain unevenness; then mechanical fine polishing is performed with silk cloth to remove the scratches left by the mechanical rough polishing of the grains; mechanical fine polishing with silk cloth After polishing, use a 15% KI solution at 15°C for 1 minute of chemical corrosion polishing to make the surface of the grains smooth and there are no obvious concave holes between the grain boundaries; then perform mechanical fine polishing with silk cloth, and use 10 %KI solu...

Embodiment 2

[0031] The process and steps of the polycrystalline mercury iodide film room temperature nuclear radiation detector in this embodiment are as follows:

[0032](1) The crystal grains prepared on the amorphous silicon thin film glass substrate are columnar, and the crystal grain direction belongs to the (001) crystal plane type polycrystalline mercury iodide thin film with a size of 2 inches * 2 inches. Use fine sand paper to mechanically polish the film to make the grain surface smooth without obvious grain unevenness; then perform mechanical fine polishing with silk cloth to remove the scratches left by the grain after mechanical rough polishing; After mechanical fine polishing of silk cloth, chemical corrosion polishing was carried out with 20% KI solution at 10°C for 1 minute, so that the surface of the grains was smooth and there were no obvious concave holes between the grain boundaries; then mechanical fine polishing was performed with silk cloth, and the 15% KI solution ...

Embodiment 3

[0036] The process and steps of the polycrystalline mercury iodide film room temperature nuclear radiation detector in this embodiment are as follows:

[0037] (1) The crystal grain prepared on the conductive glass substrate substrate with gold thin film in advance is columnar, and the crystal grain direction belongs to the polycrystalline iodide of 2 inches * 2 inches in size of the (001) crystal plane type Mercury film, first use fine sandpaper to mechanically polish the film to make the surface of the grains smooth without obvious grain unevenness; then perform mechanical fine polishing with silk cloth to remove the mechanical rough polishing left by the grains Scratches; after mechanical fine polishing with silk cloth, chemical corrosion polishing is carried out with 18% KI solution at 15°C for 1 minute, so that the surface of the grains is smooth and there is no obvious concave hole between the grain boundaries; and then mechanically polished with silk cloth For fine poli...

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Abstract

The invention relates to a preparation method of a nuclear radiation detector for a multi-crystalline mercuric iodide film at room temperature, in particular to a preparation method of a nuclear radiation detector for X-rays and gamma rays at room temperature, which pertains to the technical field of the preparation technique of semiconductor detectors. The detector adopts the preparation method that a multi-crystalline film which is obtained on the base of a substrate and consists of columnar crystal grains goes through the procedures of rough mechanical polishing, fine mechanical polishing, surface chemical etching, cleaning and airing; then a mask is used for evaporating and plating electrodes; finally, the detector is encapsulated, installed and fixed. The detector obtained by the invention has good energy resolution of X-rays and gamma rays at room temperature.

Description

technical field [0001] The invention relates to a method for preparing a polycrystalline mercury iodide film room temperature nuclear radiation detector, in particular to a method for preparing an X-ray and gamma ray room temperature nuclear radiation detector, and belongs to the technical field of semiconductor detector preparation technology. Background technique [0002] Mercury iodide (HgI 2 ) is a semiconductor compound developed in the 1970s as an excellent material for making room temperature semiconductor nuclear radiation detectors. It has several outstanding advantages: (1) The crystal has a large band gap (2.14eV), and thermal excitation at room temperature The number of carriers generated is small, and a room temperature nuclear radiation detector with a very small leakage current can be prepared; (2) The detector made of mercury iodide is a homogeneous body with a uniform electric field distribution, which is conducive to carrier transport. Transport; (3) the a...

Claims

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Application Information

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IPC IPC(8): H01L31/18C23F1/14C23C14/26C23C14/14C23C14/04
Inventor 郑耀明史伟民张瑜余俊阳郑伟峰王漪
Owner SHANGHAI UNIV
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