Silicon micro-resonance type accelerometer
An accelerometer and resonant technology, applied in the field of micro-inertial sensors, can solve the problems of poor stability and impact resistance of the accelerometer, poor ability to release residual stress, and low utilization of mass blocks, and improve stability and resistance. Impact capability, release of residual stress, effect of reducing material inhomogeneity
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[0013] Combine figure 1 , The present invention is based on a resonant silicon micro-accelerometer, which is used to measure a measuring instrument parallel to the base. It consists of an upper and a lower layer. The upper layer is the mechanical structure of the accelerometer made on a single crystal silicon wafer, and the lower layer is the production The signal lead on the glass substrate, the upper mechanical structure of the accelerometer is composed of a mass 1 and a pair of resonators 2a, 2b. The resonators 2a, 2b are located symmetrically up and down in the middle of the mass, which can reduce material unevenness and The asymmetry caused by processing, the structural parameters of the resonators 2a, 2b are consistent, and the differential output of the resonance frequency is effectively realized. One end of the resonator 2a, 2b is connected to the fixed base 4 between the resonator 2a, 2b, and the other end of the upper resonator 2a is connected to the output ends of the ...
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