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Method for preparing multi-layer isolation layer and YBCO coating conductor on metal base band

A metal baseband and coated conductor technology, applied in the usage of superconductor elements, metal material coating process, cable/conductor manufacturing, etc.

Active Publication Date: 2010-06-30
GRIMAT ENG INST CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

The sputtering yield of the ceramic oxide target is lower than that of the corresponding metal target, so the film growth rate is slow, and the sputtering power supply of radio frequency must be used

Method used

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  • Method for preparing multi-layer isolation layer and YBCO coating conductor on metal base band
  • Method for preparing multi-layer isolation layer and YBCO coating conductor on metal base band
  • Method for preparing multi-layer isolation layer and YBCO coating conductor on metal base band

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0074] Connect the front and rear ends of the metal base tape with cubic texture to the leader tape and clean it. Wrap the cleaned metal base tape and leader tape on the unwinding and take-up reels, place them in a vacuum chamber, and place the leader part in the deposition area. Vacuum until the back vacuum of the cavity is less than or equal to 5×10 -4 Pa; heat the metal substrate to 500°C, and after reaching the required temperature for 30 minutes, fill the chamber with argon to a pressure of 1×10-1 Pa.

[0075] Taking Y metal as the sputtering target, adopting the DC magnetron sputtering deposition method, the sputtering power is 320W, the target base distance is 120mm, and the pre-sputtering is started. After 20 minutes of pre-sputtering, water vapor was introduced to control the water content in the deposition chamber at 1×10 -3 Pa, and adjust the pressure in the deposition chamber to 1Pa, and start the formal sputtering deposition. After the official sputtering depos...

Embodiment 2

[0095] Connect the front and rear ends of the metal base tape with cubic texture to the leader tape and clean it. Wrap the cleaned metal base tape and leader tape on the unwinding and take-up reels, place them in a vacuum chamber, and place the leader part in the deposition area. Vacuum until the back vacuum of the cavity is less than or equal to 5×10 -4 Pa; heat the metal substrate to 700°C, and after reaching the required temperature for 30 minutes, fill the chamber with argon to a pressure of 5×10 -1 Pa.

[0096] Taking Y metal as the sputtering target, adopting DC magnetron sputtering deposition method, sputtering power 350W, target base distance 60mm, start pre-sputtering. After 20 minutes of pre-sputtering, water vapor was introduced to control the water content in the deposition chamber at 8×10 -3 Pa, and adjust the pressure in the deposition chamber to 2Pa, and start the formal sputtering deposition. After the official sputtering deposition starts, the metal base t...

Embodiment 3

[0106] Connect the front and rear ends of the metal base tape with cubic texture to the leader tape and clean it. Wrap the cleaned metal base tape and leader tape on the unwinding and take-up reels, place them in a vacuum chamber, and place the leader part in the deposition area. Vacuum until the back vacuum of the cavity is less than or equal to 5×10 -4 Pa; heat the metal substrate to 800°C, and after reaching the required temperature for 30 minutes, fill the chamber with argon to a pressure of 8×10 -1 Pa.

[0107] With Y metal as the sputtering target, the DC magnetron sputtering deposition method is adopted, the sputtering power is 350W, the target base distance is 80mm, and the pre-sputtering is started. After 20 minutes of pre-sputtering, water vapor was introduced to control the water content in the deposition chamber at 7×10 -3 Pa, and adjust the pressure in the deposition chamber to 5Pa, and start the formal sputtering deposition. After the official sputtering depo...

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Abstract

The invention relates to a multilayer isolation layer and an YBCO coating conductor formed on a metal basic belt, sequentially arranging an yttrium oxide film, an yttrium stabilized zirconium dioxide film, three lays of cerium dioxide film and a super-conductive layer YBCO layer on the cubic-structure metal basic belt. A manufacturing method for the multilayer isolating layer and YBCO coating conductor formed on the metal basic belt includes the following steps: (1) the metal basic belt is cleaned; (2) the metal basic belt is wrapped on to a belt-feeding wheel and a belt-collecting wheel; (3)metal-Y is adopted as a sputtering target and pre-sputtering is carried out; (4) the metal basic belt is delivered to a settlement zone to sputter and settle yttrium oxide; (5) metal-Zr-Y is adopted as the sputtering target and the pre-sputtering is carried out; (6) the metal basic belt passes through the settlement zone to sputter and settle the yttrium stabilized zirconium dioxide; (7) metal-Ceis adopted as sputtering target and the pre-sputtering is carried out; (8) the metal basic belt passes through the settlement zone to sputter and settle cerium dioxide; (9) a magnetron sputtering settlement of the YBCO coat is carried out; (10) the multilayer isolation layer and YBCO coat conductor formed on the metal basic belt is obtained. The method adopts steam to displace oxygen as reaction air, and the manufactured multilayer isolation layer has single cubic structure and the YBCO coat is formed on an extension part of the isolation layer. The forming of each film of the invention adopts a magnetron sputtering method so as to reduce manufacturing cost.

Description

technical field [0001] The invention relates to a multi-layer isolation layer grown on a metal base tape and a YBCO coated conductor and a preparation method thereof. The multi-layer cubic texture oxide isolation layer is prepared on the metal base tape, and the multi-layer cubic texture oxide is prepared on the metal base tape. The invention discloses a method for preparing yttrium barium copper oxide (YBCO) coated conductors on a metal base band of an isolation layer, including the preparation of the isolation layer and the YBCO, and relates to a magnetron sputtering preparation method. Background technique [0002] The Y-series coated conductor is grown YBCO on a flexible metal substrate with a cubic texture isolation layer. This is because the high-temperature superconducting material is an oxide ceramic with poor toughness. To manufacture a long superconducting wire or strip, a flexible metal material must be used as a substrate, and the oxide superconducting material ...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H01B12/06H01B13/00C23C14/35C23C14/54C23C14/06
CPCY02E40/642Y02E40/60
Inventor 杨坚张华刘慧舟周其古宏伟
Owner GRIMAT ENG INST CO LTD