Catalyst for producing tetrafluoromethane by gas-phase fluorination and preparation method thereof

A tetrafluoromethane, gas-phase fluorination technology, applied in the direction of physical/chemical process catalysts, chemical instruments and methods, metal/metal oxide/metal hydroxide catalysts, etc., can solve the problems of low operating temperature, poor activity, and stability No high problems, to achieve the effect of low temperature, high stability, high catalytic activity or selectivity

Inactive Publication Date: 2009-01-07
ZHEJIANG NORMAL UNIVERSITY +1
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0021] The purpose of the present invention is to provide a catalyst with high activity, high selectivity and high stability for the disadvantages of poor activity and low stability of exi

Method used

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  • Catalyst for producing tetrafluoromethane by gas-phase fluorination and preparation method thereof
  • Catalyst for producing tetrafluoromethane by gas-phase fluorination and preparation method thereof
  • Catalyst for producing tetrafluoromethane by gas-phase fluorination and preparation method thereof

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0032] First, weigh Cr according to the molar ratio between Cr and Al is 1:4 2 o 3 and Al(OH) 3 , mix evenly with an appropriate amount of water, add a certain amount of ammonia water until the precipitation is complete, then separate and wash until the filtrate is neutral, and then dry the precipitate at 70°C. After the dried precipitate was molded, it was heated at 300°C and N 2 Calcined in the atmosphere for 48 hours to obtain a fluorinated catalyst precursor. The fluorination catalyst precursor was treated with HF at 250° C. for 48 hours to obtain a fluorination catalyst. Its reactivity or selectivity are shown in Table 1, Table 2, Table 3, Table 4.

Embodiment 2

[0034] First, weigh Cr(OH) according to the molar ratio between Cr and Al of 1:19 3 and Al(NO3 ) 3 , mix well with an appropriate amount of water, add a certain amount of Na 2 CO 3 After the precipitation is complete, it is separated and washed until the filtrate is neutral, and then the precipitate is dried at 120°C. After the dried precipitate was molded, it was heated at 600°C and N 2 Calcined in the atmosphere for 24 hours to obtain a fluorinated catalyst precursor. The fluorination catalyst precursor was treated with HF at 400° C. for 30 hours to obtain a fluorination catalyst. Its reactivity or selectivity are shown in Table 1, Table 2, Table 3, Table 4.

Embodiment 3

[0036] First, weigh CrCl according to the molar ratio between Cr and Al of 1:3 3 and Al 2 o 3 , mix evenly with an appropriate amount of water, add a certain amount of KOH until the precipitation is complete, then separate and wash until the filtrate is neutral, and then dry the precipitate at 90°C. The dried precipitate is shaped and calcined at 400° C. in an air atmosphere for 36 hours to obtain a fluorination catalyst precursor. The fluorination catalyst precursor was treated with HF at 350° C. for 35 hours to obtain a fluorination catalyst. Its reactivity or selectivity are shown in Table 1, Table 2, Table 3, Table 4.

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Abstract

The invention relates to a catalyst used for fluoridation. Aiming at the deficiencies that the activity is worse and the stability is not high in the prior catalyst used for producing FC-14 through gas phase fluorination, the invention provides a catalyst used for producing tetrafluoromethane through the gas phase fluorination and possessed of high activity, high selectivity, high stability and low application temperature, as well as the preparation method thereof. The catalyst of the invention comprises a carrier and an active ingredient, wherein, the carrier adopts the compound of aluminum; and the active ingredient adopt the compound of chromium. The catalyst of the invention comprises the following preparation process: firstly, the compound of Al and the compound of Cr are weighed out according to a certain proportion, after water is added and the compounds are uniformly mixed, a precipitating agent is added until the compounds are completely precipitated, then separation and washing are carried out until the filtrate is neutral, and the precipitate is dried; secondly, the dried precipitate is calcined after being shaped, so as to obtain a fluorination catalyst precursor; and thirdly, the fluorination catalyst precursor is processed by HF, so as to obtain the catalyst of the invention.

Description

technical field [0001] The invention relates to a catalyst for fluorination reaction, especially suitable for producing tetrafluoromethane (FC-14) by gas-phase fluorination. Background technique [0002] It is known that tetrafluoromethane (hereinafter referred to as FC-14) is a very useful compound in industry, for example, it is currently the largest plasma etching gas in the microelectronics industry, and its high-purity gas and tetrafluoromethane high-purity gas combination The mixed gas of high-purity oxygen can be widely used in the etching of thin film materials such as silicon, silicon dioxide, silicon nitride, phosphosilicate glass and tungsten; it can be used in the surface cleaning of electronic devices, the production of solar cells, laser technology, gas phase insulation, There are also significant uses in ultra-low temperature refrigerants, leak detection agents, stain removers, metal smelting, and the plastics industry, but the cost of producing FC-14 has limi...

Claims

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Application Information

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IPC IPC(8): B01J23/86C07C17/20C07C19/08
Inventor 罗孟飞钱林鲁继青邢丽琼毕庆员周黎旸陈科峰张学良苏利红
Owner ZHEJIANG NORMAL UNIVERSITY
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