High-density carbon nanotube array and method for preparing same
A carbon nanotube array and carbon nanotube technology, applied in the field of carbon nanotube array and its preparation, can solve the problems of complex preparation process and the inability to adjust the density of carbon nanotube array arbitrarily, and achieve simple process, easy practical application, The effect of tight arrangement
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[0024] The high-density carbon nanotube array and its preparation method of this embodiment will be described in detail below with reference to the accompanying drawings.
[0025] see figure 1 , the preparation method of the high-density carbon nanotube array in this embodiment mainly includes the following steps:
[0026] Step 1: providing a carbon nanotube array, preferably, the array is a super-aligned carbon nanotube array.
[0027] In this embodiment, the preparation method of the carbon nanotube array adopts the chemical vapor deposition method, and the specific steps include: (a) providing a flat substrate, which can be a P-type or N-type silicon substrate, or a silicon substrate with an oxide layer formed on it. Silicon substrate, the present embodiment preferably adopts a 4-inch silicon substrate; (b) uniformly form a catalyst layer on the surface of the substrate, and the catalyst layer material can be selected from iron (Fe), cobalt (Co), nickel (Ni) or any of them...
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