Tunneling type graphite boat for semi-conducting material liquid phase epitaxial growth

Abstract

The invention discloses a tunnel-typed graphite boat applied to liquid phase epitaxial growth of semi-conductive material. The graphite boat comprises: a boat body with tunnels, a slider matched with the dimension of cross-section of the tunnels, a cover and a graphite pad. The top surface of the tunnel is provided with a plurality of mother liquid square holes equal spaced and loading with mother liquid of different integrants, the center of the slider is provided with a substrate square hole with the same dimension of an epitaxial substrate, the graphite pad is arranged in the substrate square hole to regulate height between the substrate and the square hole mouth, and the substrate is arranged on the graphite pad. The mother liquid is contacted with the substrate through sliding the slider, and a layer of film material epitaxially grows on the substrate. The method has the advantages that: a substrate groove of the graphite boat is replaced by the substrate square hole, the bottom of the boat body is taken as the backing plate for installing the graphite pad and the substrate to cause that in the graphite boat processing, vertical degree in the hole and flatness of the bottom are guaranteed and the height of the substrate can be adjusted by the graphite pad. The characteristics can effectively reduce residual quantity of the mother liquid and improve quality and yield rate of single crystal films.

Description

technical field [0001] The invention relates to liquid phase epitaxy equipment for growing semiconductor single crystal thin films, in particular to a tunneling graphite boat used for growing horizontal liquid phase epitaxy thin film materials. Background technique [0002] At present, the graphite boats used in the growth process of thin film materials can be divided into two types: the liquid tank for placing the mother liquid and the slide for placing the substrate. Graphite boats for mother liquor sliding usually consist of a base, a bottom plate and a slider. The bottom plate is fixed on the base, and there is a hole on the bottom plate with the same size as the substrate for placing the substrate. There is also a hole on the slider for placing the mother liquor. By moving the slider, the mother liquor is in contact with the substrate. A layer of thin film material is epitaxially grown on the bottom. The biggest advantage of the mother liquor sliding type graphite boa...

AI Technical Summary

Problems solved by technology

However, at present, the slider of the tunneling graphite boat uses a groove to place the substrate, and it is difficult to guarantee the verticality of the groove and the flatness of the bottom surface during the processing, which directly affects the growth of high-quality epitaxial films.

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