Single chip integrated micro-wave light quantum phase shifter based on SOI optical waveguide and preparation

Abstract

The invention belongs to the microwave photonic device field and relates to a microwave photonic phase switcher integrated with a single chip on the basis of an SOI optical waveguide and the preparation method thereof. The microwave photonic phase switcher is composed of a cascade waveguide branching unit composed of three Y branches, a constant time lag unit composed of four waveguide delay lines, and four variable crystal liquid light decaying units and a cascade waveguide combiner composed of three Y branches which are arranged on the waveguide delay line; the cascade waveguide branching unit, the constant time lag unit and the cascade waveguide combiner are composed of spine-type optical waveguides arranged on an SOI substrate, and a top layer silicon, a buried layer silicon dioxide and a silicon substrate are arranged in sequence from top to bottom. According to different frequencies of the microwave signal which requires the phase shift, the continuous phase shift of 0 to 360 degree can be realized for the microwave signal of 2 GHz to 20 GHz by design of the length of a constant time lag line. The microwave photonic phase switcher has the advantages of high integration level, compact structure and small size.

Description

technical field [0001] The invention belongs to the field of microwave photonic devices, and relates to a monolithically integrated microwave photon phase shifter based on SOI optical waveguide and a preparation method thereof. Background technique [0002] Phased-array antenna (PAA) technology, which began to be used in the early 1970s, is now gaining importance in areas such as radar and communications. Replacing mechanical scanning with electrical scanning has greatly improved the scanning speed, flexibility and ability to deal with multiple targets of the antenna. However, the all-electric control system has large size, high loss, narrow instantaneous bandwidth, and poor ability to resist electromagnetic interference. With the development of microwave photonic technology, using optical fiber instead of traditional metal waveguide and coaxial cable to transmit microwave signals can not only reduce volume, weight, cost, and improve anti-interference ability, but also has ...

AI Technical Summary

Problems solved by technology

The existing microwave photonic phase shifter of vector sum technology is composed of discrete components such as splitters, fixed delay units, attenuation units, and combiners, which makes the structure of the entire device complex and cannot meet the needs of current optoelectronic devices towards integration and miniaturization. direction development needs

In addition, the vector sum phase shifter uses optical fiber as the delay line, because the length error of fiber cutting affects the accuracy of the phase shifter

Images