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Method and apparatus for removing hydrogen peroxide

A technology for hydrogen peroxide removal, applied in chemical instruments and methods, separation methods, nanotechnology for materials and surface science, etc., can solve problems such as low reaction rate, low contact efficiency, and small specific surface area of ​​catalysts

Active Publication Date: 2009-02-25
KURITA WATER INDUSTRIES LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, the supported catalyst has a small specific surface area and low contact efficiency
Therefore, the reaction rate is small, and a large amount of catalyst-loaded resin is required in order to realize the treatment reliably.

Method used

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  • Method and apparatus for removing hydrogen peroxide
  • Method and apparatus for removing hydrogen peroxide
  • Method and apparatus for removing hydrogen peroxide

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0061] Platinum nanomicelle particles with an average diameter of 3.5nm are deposited and loaded on the gel-type strongly basic anion exchange resin, and the deposition amount is 0.07% of the weight of the carrier, and a hydrogen peroxide decomposition catalyst is prepared.

[0062] A column made of acrylic resin was filled with 100 ml of the prepared hydrogen peroxide decomposition catalyst, and at SV=1,000 h -1 Next, ultrapure water containing 29.54 ppb (by weight) hydrogen peroxide was passed through the column in a downward direction. The concentration of hydrogen peroxide in the treated water discharged from the column was 0.38 ppb by weight, and the removal rate of hydrogen peroxide was 98.7%.

[0063] At SV=200h -1 、400h -1 、600h -1 、800h -1 、1,500h -1 and 2,000h -1 Next, ultrapure water containing 29.5 ppb (by weight) of hydrogen peroxide was passed in a downward direction through a column packed with the same hydrogen peroxide decomposition catalyst. The remova...

Embodiment 2

[0065] Carry out the same operation with those operations carried out in embodiment 1, difference is, in the catalyzer that uses, average diameter is the palladium nano colloid particle deposition of 3.5nm and is supported on the strongly basic anion exchange resin, and deposition amount is 0.07% by weight of the carrier, and ultrapure water containing 29.32 ppb (weight) was passed through the column.

[0066] At SV=1,000h -1 Under this condition, the concentration of hydrogen peroxide in the treated water discharged from the column was 0.50 ppb by weight, and the removal rate of hydrogen peroxide was 98.3%. At SV=200h -1 、400h -1 、600h -1 、800h -1 、1,500h -1 and 2,000h -1 The removal rates of hydrogen peroxide were 100.0%, 99.4%, 99.0%, 98.7%, 97.4% and 96.7%, respectively.

Embodiment 3

[0079] Connect a container with 10 liters of hydrogen peroxide decomposition catalyst with the outlet of the ultraviolet oxidation treatment device of the ultrapure water production device, and the hydrogen peroxide decomposition catalyst is a platinum nanogel with an average diameter of 3.5nm to be loaded The particles are deposited on the gel-type strongly basic anion exchange resin (the deposition amount is 0.07% of the weight of the carrier). A membrane degasser, a mixed bed vessel filled with anion exchange resin and an ultrafiltration unit are connected after the catalyst-filled vessel. The device made by using the 10m 3 / h flow rate to produce ultrapure water.

[0080] The concentration of hydrogen peroxide in the water flowing into the container containing the hydrogen peroxide decomposition catalyst was 15.78 ppb by weight, and the concentration of hydrogen peroxide in the treated water flowing out from the container was 0.14 ppb. The removal rate of hydrogen peroxi...

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Abstract

A method of removing hydrogen peroxide from water, characterized by bringing hydrogen peroxide-containing raw water into contact with a hydrogen peroxide decomposition catalyst which comprises a support and, deposited thereon, nanocolloidal particles of a platinum-group metal having an average particle diameter of 1-50 nm. Also provided is an apparatus for removing hydrogen peroxide, characterized by comprising: a hydrogen peroxide decomposer packed with a catalyst which comprises a support and, deposited thereon, nanocolloidal particles of a platinum-group metal having an average particle diameter of 1-50 nm; a water supply means for supplying hydrogen peroxide-containing raw water to the decomposer; and a drainage means for discharging from the decomposer the water which has been contacted with the catalyst. By the method and apparatus, hydrogen peroxide contained in raw water can be rapidly removed without fail. They are suitable for removing hydrogen peroxide from ultrapure water in an apparatus for ultrapure water production which is used especially in an industry where electronic materials such as semiconductors and liquid crystals are handled.

Description

technical field [0001] The present invention relates to a method for removing hydrogen peroxide and a device for removing hydrogen peroxide. More specifically, the present invention relates to a method for removing hydrogen peroxide and an apparatus for removing hydrogen peroxide, which can quickly and surely remove hydrogen peroxide from water to be treated, and It is particularly suitable for removing hydrogen peroxide in ultrapure water used in an industry for processing electronic materials such as semiconductors and liquid crystals in ultrapure water production facilities. Background technique [0002] Removal of hydrogen peroxide in water to be treated has been performed as follows: a method in which a reducing agent is added to water, a method in which water is brought into contact with activated carbon, or a method in which water is brought into contact with a metal-loaded resin. In the method in which a reducing agent is added to water, reducing agents such as sodi...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C02F1/58B01D19/00B01D61/00B01J31/08B01J35/02C02F1/20B01J35/00
CPCB01J35/0013C02F1/42B01J2531/828C02F2103/04B01D19/0073C02F2103/346C02F2101/10B01J2531/824B01J35/006C02F1/70C02F2303/18C02F2305/08B01J23/40B01J31/08B82Y30/00B01J35/393B01J35/23B01J35/45C02F1/58B01D19/00B01D61/00
Inventor 小林秀树
Owner KURITA WATER INDUSTRIES LTD
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