2x2MEMS optical switch based on double-optical fiber ellipse light spot collimator
An elliptical spot and collimator technology, applied in the coupling of optical waveguides, optics, instruments, etc., can solve the problems that MEMS are difficult to achieve, the travel of MEMS micromirrors is large, and the radius of the spot is large.
Active Publication Date: 2009-04-15
QST CORP
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However, the conventional fiber collimator has a relatively large beam waist spot radius (200um ~ 300um), so the transla
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[0037] (1) Installation and commissioning of the dual-fiber elliptical spot collimator (C-lens): figure 2 As shown in the figure, install the collimating lens and the double-fiber head with an 8-degree bevel in the glass tube, adjust the position and fix it with glue.
[0038] (2) Fabrication of MEMS comb-driven micromirrors: First, lithography is applied on a silicon substrate, and then a window is etched or etched; Cr-Au is sputtered to make a mirror reflection layer and electrodes; the back is thinned and polished After coating photolithography, micromirrors and comb structures are etched, such as Figure 4 .
[0039] (3) Installation and commissioning of the optical switch: install the two double-fiber elliptical spot collimators and the MEMS micromirror in the sleeve, adjust the position and fix it with glue, such as Image 6 .
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The invention relates to a 2*2MEMS optical switch based on a double optical fiber elliptical light spot collimator. The optical switch is characterized in that: (1) the optical switch is formed by coupling a pair of the double optical fiber elliptical light spot collimators with an MEMS micro-mirror; (2) a beam waist light spot of an exit light beam of the double optical fiber elliptical light spot collimator is an elliptical light spot, that is, the radii of the light spots in two vertical directions are unequal; (3) a collimating lens of the optical fiber collimator comprises a cylindrical surface, and a circular light spot is changed into the elliptical light spot; (4) the surface of the collimating lens is plated with an anti-reflection film to increase return loss; (5) the elliptical light spot collimator is a double optical fiber collimator, and an input optical fiber is a double optical fiber; (6) the MEMS micro-mirror is an MEMS comb drive actuated micro-mirror; and (7) the MEMS micro-mirror is arranged at the beam waist of the exit light beam of the elliptical light spot collimator, and the drive direction corresponds with the minor axis of the light spot. In the optical switch, the requirement of the 2*2 optical switch for the MEMS micro-mirror drive stroke can be greatly reduced, and the stroke of microns can immediately obtain sufficiently low optical signal crosstalk.
Description
technical field [0001] The invention relates to a 2×2 MEMS optical switch based on a dual-fiber elliptical spot collimator. The dual-fiber elliptical spot collimator is coupled with a MEMS translational micromirror and fixed in a sleeve. The invention belongs to the field of optical communication devices. Background technique [0002] Optical switches play a very important role in optical communication networks. Among them, the 2×2 optical switch has a wide range of applications. It not only constitutes the switching core of key equipment (such as OADM, OXC) in the wavelength division multiplexing optical network, but also is a key device in the optical network itself. Its scope of application mainly includes: [0003] Protection switching function: Optical switches are usually used for network fault recovery. When the fiber breaks or other transmission failures occur, the optical switch is used to realize the detour route of the signal, and switch from the main route to ...
Claims
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Login to view more IPC IPC(8): G02B6/35G02B6/32G02B26/10
Inventor 吴亚明黄占喜
Owner QST CORP
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