Gas magnetic mixing suspension type plane motor with six freedom degrees

Abstract

The invention discloses a gas-magnetic mixed suspension type of 6-DOF (degree of freedom) planar motor comprising a stator substrate placed on the horizontal XY plane and a mover substrate floating on the stator substrate and parallel to the stator substrate. The four angles on the upper surface of the stator substrate are respectively provided with a first permanent magnet array, a second permanent magnet array, a third permanent magnet array and a fourth permanent magnet array. The wavelength direction of the first permanent magnet array and the third permanent magnet array thereof is the same with X axis and the wavelength direction of the second permanent magnet array and the fourth permanent magnet array is the same with Y axis. The four angles of the lower surface of the mover substrate are respectively provided with a first thrust winding, a second thrust winding, a third thrust winding and a fourth thrust winding. The wavelength direction of the first thrust winding and the third thrust winding thereof is the same with X axis and the wavelength direction of the second thrust winding and the fourth thrust winding is the same with Y axis. The four angles of the lower surface of the moving substrate are respectively provided with a first aerostatic bearing air cushion, a second aerostatic bearing air cushion, a third aerostatic bearing air cushion and a fourth aerostatic bearing air cushion.

Description

1. Technical field: [0001] The invention relates to a planar motor that can be used in the fields of semiconductor processing industry, high-precision plotter, etc., and particularly relates to a gas-magnetic hybrid levitation six-degree-of-freedom planar motor with a single mover structure. 2. Background technology: [0002] With the rapid development of advanced manufacturing industry, high-precision positioning platform technology has been in-depth research and development, and has broad application prospects in the semiconductor industry, micro-stereolithography, nano-workbench, high-precision plotter and other fields, among which the most important Its application is a high-precision lithography positioning platform in the semiconductor industry. The lithography positioning platform needs to perform precise motion control in an approximately flat space (so it is called a planar motor), including: realizing large-stroke motion in the horizontal X-axis and Y-axis directio...

AI Technical Summary

Problems solved by technology

At present, there are mainly four kinds of levitation technologies that can be selected, electric levitation, superconducting levitation, gas levitation, and magnetic levitation. Among them, electric levitation realized by eddy current phenomenon will affect the positioning accuracy of planar motor due to excessive heat dissipation; superconducting levitation is in Under the current technical conditions, it is expensive and complicated to implement; the gas suspension is simple to implement and the stiffness is ideal, but the working principle of the gas suspension determines that it can only be used to set the nominal suspension position, and there is no dynamic adjustment of the size of the air suspension air gap. technology; the positioning accuracy of the magnetic suspension bearing is mainly determined by the accuracy of the air gap sensor, which has lower requirements on the accuracy of the bearing surface, and can realize the rapid adjustment of the suspension air gap, but generally needs to add several groups of electromagnets to be used as the magnetic suspension electromagnetic actuator

Images