Method for manufacturing biological detector of field effect transistor based on carbon nano tube

Abstract

The invention relates to a method for manufacturing a biological detector of a field effect transistor based on a non-covalent modified single-walled carbon nano tube, which belongs to the technical fThe invention relates to a method for manufacturing a biological detector of a field effect transistor based on a non-covalent modified single-walled carbon nano tube, which belongs to the technical field of nano electronic device manufacture and biological analysis and detection. The method comprises the following steps: setting up the single-walled carbon nano tube (beam) between an interdigitalield of nano electronic device manufacture and biological analysis and detection. The method comprises the following steps: setting up the single-walled carbon nano tube (beam) between an interdigital source electrode and a drain electrode made on a silicon substrate of which the surface contains an insulating oxide according to a photoetching technique; constructing the field effect transistor basource electrode and a drain electrode made on a silicon substrate of which the surface contains an insulating oxide according to a photoetching technique; constructing the field effect transistor based on the carbon nano tube; and modifying a non-covalent glycosylation organism on the surface of the carbon nano tube to obtain a field effect transistor based on the carbon nano tube for the detectsed on the carbon nano tube; and modifying a non-covalent glycosylation organism on the surface of the carbon nano tube to obtain a field effect transistor based on the carbon nano tube for the detection of the recognition function of saccharide-protein specificity. The method can selectively modify different sugar molecules to detect specificity combining actions between different sugar ligands aion of the recognition function of saccharide-protein specificity. The method can selectively modify different sugar molecules to detect specificity combining actions between different sugar ligands and receptors so as to form the universal, flexible and efficient biological detector of the field effect transistor based on the carbon nano tube.nd receptors so as to form the universal, flexible and efficient biological detector of the field effect transistor based on the carbon nano tube.

Description

technical field [0001] The invention relates to a method for manufacturing a field-effect transistor biological detection device based on non-covalently modified single-walled carbon nanotubes, and belongs to the technical fields of nanoelectronic device manufacturing and biological analysis and detection. Background technique [0002] Due to the excellent electrical properties of single-walled carbon nanotubes (SWNTs), field-effect transistors based on semiconducting SWNTs have been extensively studied. At present, there are several major types of preparation methods: one is the template method, which uses CVD to grow single-walled carbon nanotubes on silicon substrates with specific patterns and catalyst islands, and then combines microelectronics processing technology to achieve good Ohmic contact; the second is the electrode method, first ultrasonically dispersing and uniformly distributing the carbon nanotubes on the silicon substrate, and then using focused ion beam te...

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However, there are few reports on the detection of sugar-p

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