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Adjusting device of movable lens

A technology of lens adjustment and moving parts, which is applied in the exposure device, installation, and optics of the photoplate making process. It can solve the problems of self-locking, low mechanism precision, and difficult cam processing, etc., and achieves compact structure, stable operation, and Improvement of operability

Active Publication Date: 2009-09-09
SHANGHAI MICRO ELECTRONICS EQUIP (GRP) CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, the machining of the cam is difficult, self-locking cannot be realized, and there is a certain gap between the slider and the guide rail of the linear slide rail, and the mechanism accuracy is not high

Method used

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  • Adjusting device of movable lens
  • Adjusting device of movable lens
  • Adjusting device of movable lens

Examples

Experimental program
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Effect test

Embodiment Construction

[0020] figure 1 It is a schematic diagram of the structure of the movable lens adjustment device; figure 2 It is a schematic diagram of the structure of the movable lens mechanism looking up; image 3 It is a schematic cross-sectional view of the structure of the movable lens mechanism. Please refer to Figure 1 ~ Figure 3 .

[0021] The movable lens adjusting device disclosed in this embodiment is for adjusting the position of the movable part 9 relative to the fixed part 12 .

[0022] The movable lens adjustment device mainly includes: main lens barrel 1, rolling assembly 2, driven gear 3, driving gear 4, circumferential wedge block 5, servo motor 6, plate spring 8, movable part 9, fine-tuning screw device 10, Fixing piece 12, tension spring 13, displacement sensor 16.

[0023] The main lens barrel 1 is the basis for the installation of the entire movable lens adjustment device, and provides an installation level reference for the fixed part 12, the movable part 9 and ...

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Abstract

The invention relates to an adjusting device of a movable lens, which is used for adjusting the axial position of a movable piece relative to a fixed piece. The adjusting device of a movable lens comprises a main lens cone, a circumference wedge and a plurality of rollers which are all arranged along an optical axis in sequence, wherein the fixed piece is fixed in the main lens cone; the circumference wedge continuously expands along the axial thickness of the circumference direction of the main lens cone; the circumference wedge can be rotationally arranged below the main lens cone; shafts of the rollers are fixed on the movable piece; and the rollers are placed on the wedgy surface of the circumference wedge and roll along the wedgy surface. When the rollers roll on the wedgy surface, the fixed piece can axially move. The adjusting device of the movable lens has high adjusting precision and good repeatability. The movable piece has large tendency of movement and good linearity.

Description

technical field [0001] The invention relates to a movable lens adjusting device, and more to a displacement adjusting device with the movable lens adjusting device. Background technique [0002] The projection optical system in the exposure equipment of advanced lithography machine needs smaller and smaller wave aberration and distortion. changes to compensate. In order to solve this type of problem, one or several lens positions can be adjusted to compensate. [0003] There are many ways to realize the lens adjustable mechanism. In the Chinese patent CN1317725A "Optical Element Holding Device for Exposure Equipment", the actuator composed of piezoelectric elements drives a flexible four-bar mechanism, and the four-bar mechanism converts the horizontal movement of the actuator into a movable lens. direction of the optical axis. Its advantages are high precision, low heat generation, and low noise, but the flexible linkage mechanism is complex, difficult to manufacture, an...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G02B7/02G03F7/20
Inventor 谭长永朱岳彬
Owner SHANGHAI MICRO ELECTRONICS EQUIP (GRP) CO LTD
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