Distributed MEMS phase shifter based on MAM capacitor

Abstract

The invention discloses a distributed MEMS phase shifter based on a MAM capacitor, and the MEMS phase shifter comprises a substrate, a central conductor, a silicon nitride film layer, an MEMS metal bridge, a metal plate A, a metal plate B, a grounding plate A and a grounding plate B. The structures of the metal plate A and the metal plate B are identical. The structures of the grounding plate A and the grounding plate B are identical. The distributed MEMS phase shifter utilizes the equivalent circuit mode for configuration for obtaining a mechanical structure, and the mechanical structure is astructure body with a certain length, width and thickness of 1mum-3mum produced by adopting the copper bonding process on the substrate. The MEMS phase shifter has low requirements on the regulationprecision of the pull-down height of the MEMS metal bridge, and the phase filter with easy control of phase shift precision and stable mechanical performance can be obtained just by carrying out the structural optimization on the metal plates.

Description

technical field [0001] The invention relates to a phase shifter, more particularly, to a distributed MEMS phase shifter based on a MAM capacitor suitable for a millimeter wave band phased array antenna. Background technique [0002] Since the 1990s, MEMS (Micro-Electro-Mechanical Systems) technology has been widely used in the production of various radio frequency devices with low insertion loss and wide operating frequency band, demonstrating irreplaceable advantages in the field of radio frequency. The main function of the phase shifter is to realize the phase control or transformation of the input signal. [0003] In the traditional phase shifter circuit, diodes or ferrite devices are often used as the main components of the phase shifter circuit, but this is not feasible in the phased array feed network of the millimeter wave band, because the traditional phase shifter volume Large, high insertion loss, and difficult to integrate, the array element spacing of the millim...

AI Technical Summary

Problems solved by technology

[0003] In the traditional phase shifter circuit, diodes or ferrite devices are often used as the main components of the phase shifter circuit, but this is not feasible in the phased array feed network of the millimeter wave band, because the traditional phase shifter volume Large, high insertion loss, difficult to integrate, the array element spacing of the millimeter-wave band phased array is on the order of millimeters, even smaller than the physical size of the components

Moreover, more array elements and phase shifters are often required in millimeter-wave phased arrays. The heat dissipation and mutual coupling problems between array elements formed by traditional microstrip circuits restrict the development of this technology.

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