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Method for manufacturing surface acoustic wave sensor

A technology of surface acoustic wave and manufacturing method, which is used in the generation of ultrasonic/sonic/infrasonic waves, instruments, and material analysis using sonic/ultrasonic/infrasonic waves, etc. problems, to achieve the effect of improving sensing efficiency and accuracy, large contact area, and simple process

Inactive Publication Date: 2009-11-25
HONG FU JIN PRECISION IND (SHENZHEN) CO LTD +1
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Problems solved by technology

[0004] The sensing film is usually formed on the surface of the piezoelectric substrate by chemical vapor deposition (Chemical Vapor Deposition, CVD). However, this method tends to cause the surface of the sensing film to be uneven, and the contact area with the analyte is small

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  • Method for manufacturing surface acoustic wave sensor
  • Method for manufacturing surface acoustic wave sensor
  • Method for manufacturing surface acoustic wave sensor

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Embodiment Construction

[0014] The present invention will be described in further detail below in conjunction with the accompanying drawings.

[0015] see figure 1 , an embodiment of the present invention provides a method for manufacturing a surface acoustic wave sensor, which includes the following steps:

[0016] Step 102: forming input interdigital electrodes and output interdigital electrodes on the surface of a piezoelectric substrate;

[0017] Step 104: Plating a sensing material layer on the surface of the piezoelectric substrate between the input interdigital electrode and the output interdigital electrode;

[0018] Step 106: Fabricate a predetermined pattern on the surface of the sensing material layer by nanoimprinting method to form a sensing film to obtain a surface acoustic wave sensor.

[0019] see Figure 2 to Figure 5 , the fabrication method of the surface acoustic wave sensor is specifically as follows:

[0020] see figure 2 , in step 102, a piezoelectric substrate 20 is prov...

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Abstract

The invention discloses a method for manufacturing a surface acoustic wave sensor, which comprises the following steps: plating a sensing material layer on the surface of a piezoelectric substrate; making preset patterns on the surface of the sensing material layer by using a nanoimprint lithography; and before the step of plating the sensing material layer or after making the preset patterns on the surface of the sensing material layer, forming an input interdigital electrode and an output interdigital electrode on the surface of the piezoelectric substrate on the two opposite sides of the sensing material layer to obtain the surface acoustic wave sensor.

Description

technical field [0001] The invention relates to a manufacturing method of a surface acoustic wave sensor. Background technique [0002] With the improvement of living standards, people pay more and more attention to the management of environmental quality, and various sensor products have begun to emerge accordingly. Among them, the surface acoustic wave sensor has high sensitivity, high reliability, light weight and low cost. The price and other advantages have been developed into many sensor components (see P3K-3 Surface Acoustic Waves in an Infinite Plate of Functionally Graded Materials, Ultrasonics Symposium, 2006.IEEE, 2-6 Oct.2006, Page(s) : 2242-2245). For example: gas sensors for detecting air particles, liquid sensors for detecting aqueous solutions, pressure, temperature, and humidity sensors for measuring environmental factors, and various biosensors used on living organisms Wait. These sensors can be further subdivided in terms of function and target to be me...

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Application Information

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IPC IPC(8): G01N29/34G01N29/00
CPCG01N29/022G01N2291/0256G01N2291/0423
Inventor 周代栩
Owner HONG FU JIN PRECISION IND (SHENZHEN) CO LTD
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