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Device for positioning and supporting base of vacuum equipment

A technology of vacuum equipment and positioning support, used in vacuum evaporation plating, ion implantation plating, gaseous chemical plating, etc.

Active Publication Date: 2011-03-16
IND TECH RES INST
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, in this prior art, when the base is supported by a plurality of support plates, it is impossible to know whether the base in the vacuum chamber is evenly supported by each support plate, that is, it is impossible to know the supported base. Is there a skewed state, so there is still a problem of poor film quality

Method used

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  • Device for positioning and supporting base of vacuum equipment
  • Device for positioning and supporting base of vacuum equipment
  • Device for positioning and supporting base of vacuum equipment

Examples

Experimental program
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Embodiment Construction

[0072] The embodiments of the present invention are described below through specific specific examples, and those skilled in the art can easily understand other advantages and effects of the present invention from the contents disclosed in this specification.

[0073] figure 2 It is a drawing drawn according to the first embodiment of the base positioning and supporting device of the vacuum equipment according to the present invention, as shown in the figure. figure 2 As shown, the base positioning and supporting device of the vacuum equipment in this embodiment is applied to position and support the base 10 to the coating cavity 40 of the vacuum equipment. The susceptor 10 can be lifted and lowered in the coating chamber 40 of the vacuum equipment, and has a substrate receiving portion 101 for carrying a substrate (not shown) and a center shaft portion 103 of the susceptor connecting the substrate receiving portion 101, and the two The center axis is the center axis of the...

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Abstract

The invention relates to a device for positioning and supporting a base lifting a bearing base plate applied in a cavity of vacuum equipment. The device holds and positions the base from the side surface of the base by utilizing a side positioning and supporting mechanism, thereby avoiding the position deflexion of the base in the cavity of the vacuum equipment. The side positioning and supporting mechanism and the base form a freely supported beam supporting structure so as to improve the large-area load suspension distortion of the edge of the base and enable the large-area base plate to bearranged on the base to maintain the flatness or adjust the horizontal benefit. The invention can obviously improve the evenness of the thin film deposition thickness of the large-area base plate when being applied to plate the large-area base plate.

Description

technical field [0001] The invention relates to a positioning support technology, in particular to a base positioning support device for lifting and lowering a substrate in a cavity of a vacuum equipment. Background technique [0002] Industries such as semiconductors, thin-film transistor liquid crystal displays (TFT LCD, Thin-Film Transistor Liquid Crystal Display), and thin-film solar cells have high commonality in terms of technology, materials, and equipment. At the same time, with the increasing area of ​​products, the area of ​​substrates such as silicon thin-film solar cell modules and LCD TVs that are fed into the coating equipment also increases. Therefore, whether in chemical vapor deposition (CVD, Chemical Vapor Deposition) or physical vapor deposition (PVD, Physical Vapor Deposition) coating equipment, the large-area substrate receiving base (Susceptor) for large-area coating has become a necessary component . [0003] At the same time, especially in the appli...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C23C14/50C23C16/44
Inventor 杜陈忠梁沐旺吴庆辉江铭通
Owner IND TECH RES INST
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