Vacuum annealing method for tantalum tube
A tantalum tube and annealing technology, used in furnaces, heat treatment equipment, heat treatment furnaces, etc., can solve the problems of poor structure and performance of tantalum tubes, and achieve the effects of good structure and performance, fast heat dissipation, and good process reproducibility
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[0018] In order to further illustrate the present invention, the preferred examples of the present invention are described below in conjunction with the accompanying drawings and embodiments, and the purpose, features and advantages of the present invention can be clearly seen.
[0019] Referring to accompanying drawing, the steps that the present invention implements are as follows:
[0020] 1. Cleaning: Clean the tantalum tube (Ta1) with an outer diameter of 20mm, a wall thickness of 1mm, and a length of 800mm, and dry it. Ensure that the inner and outer walls of the tantalum tube are free from oil and water marks.
[0021] 2. Loading: first put the cleaned batches of tantalum tubes into the heat-resistant material casing, and then send them into the vacuum annealing furnace along the axial direction through the automatic transmission device, and the automatic transmission device stops working.
[0022] 3. Vacuum pumping: first turn on the mechanical pump and pump until the...
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