Method for preparing parallel-oriented FePt magnetic nano-composite film

A technology of magnetic nanometer and composite film, applied in the field of magnetic nanometer, can solve the problems of oxygen oxidation and FePt nanoparticle not having good magnetic orientation, and achieve the effect of reducing magnetic storage energy, easy control of particle size and spacing, and low cost.

Inactive Publication Date: 2009-12-23
INST OF SEMICONDUCTORS - CHINESE ACAD OF SCI
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  • Abstract
  • Description
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Problems solved by technology

However, the FePt nanoparticles prepared by this method do not have a good magnetic orientation and are easily oxidized by oxygen in the air without a capping layer of nonmagnetic material.

Method used

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  • Method for preparing parallel-oriented FePt magnetic nano-composite film
  • Method for preparing parallel-oriented FePt magnetic nano-composite film
  • Method for preparing parallel-oriented FePt magnetic nano-composite film

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Embodiment

[0033] figure 2 According to the embodiment of the present invention, the process flow schematic diagram of preparing parallel-oriented FePt magnetic nanocomposite films specifically includes the following steps:

[0034] 1) Add 5 mg of amphiphilic block copolymer PS(306)-P4VP(125) into 5 mL of toluene. After sufficient stirring (more than 24 hours), the copolymer will self-assemble into uniformly sized, monodisperse reverse micelles in toluene.

[0035] 2) Add metal salt 2.58mg FeCl to the above reverse micellar solution 3 and 9.70 mg H 2 PtCl 6 , after fully stirring, the metal salt will occupy the inner core of the reverse micelles to form metal salt-loaded reverse micelles.

[0036] 3) Put the cleaned and dried (100) silicon substrate on the horizontal stage of the spin coater, start the engine and make it rotate at a constant and controllable rate along the vertical film surface at a speed of 100r / min; , a layer of monodisperse and evenly distributed metal salt-load...

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Abstract

The invention discloses a method for preparing a parallel-oriented FePt magnetic nano-composite film, which is characterized by comprising the following steps: 1, utilizing an amphiphilic block copolymer PS-P4VP to self-assemble into a reverse micelle in methylbenzene, and then adding metal salt, namely FeCl3 and H2PtCl6 into reverse micelle solution to form a metal salt supported reverse micelle; 2, utilizing a spin-coating method to obtain a reverse micelle array on a silicon substrate, and obtaining an FePt nano-particle array with good monodispersity through oxygen plasma etching and hydrogen plasma etching; 3, using a magnetic control sputtering method to cover an SiO2 protective layer on the FePt nano-particle array; and 4, performing high-temperature annealing on a sample under protective atmosphere to finish the production of the parallel-oriented FePt magnetic nano-composite film.

Description

technical field [0001] The invention relates to the field of magnetic nanotechnology, in particular to a method for preparing a parallel-oriented FePt nanocomposite thin film in combination with a reverse micelle method and a magnetron sputtering method. Background technique [0002] FePt alloy nanoparticles have high magnetocrystalline anisotropy (6.6-10×10 7 erg / cm 3 ), can overcome superparamagnetism and exhibit excellent stability in the scale of several nanometers. Thanks to this excellent stability, it can have very important applications in ultra-high-density data storage, permanent magnetic nano-films, and medicine and biology. It is the most likely to achieve a storage area density of 1Tb / in. 2 The above magnetic metal materials. [0003] At present, physical methods such as vacuum evaporation and DC / RF sputtering deposition are widely used to prepare FePt nanoparticle thin films, but the random nucleation and particle growth in the physical method lead to large ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01F41/14H01F10/12
Inventor 张兴旺高云屈盛陈诺夫
Owner INST OF SEMICONDUCTORS - CHINESE ACAD OF SCI
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