Indirect heating type testing method of high temperature resistance of carbon/carbon heaters

Abstract

The invention discloses an indirect heating type testing method of high temperature resistance of carbon / carbon heaters, comprising the following steps: 1. fixing a graphite heater on a lead electrode in a resistance furnace; 2. fixing one or more carbon / carbon heaters around the graphite heater; 3. connecting a group of positive and negative lead electrodes II which are led from the inside of the furnace to the outside of the furnace at two ends of the carbon / carbon heaters respectively; 4. correspondingly clamping measuring clamps of a Kelvin bridge on a group of positive and negative lead electrodes II; 5. introducing protective gases into the resistance furnace; 6. indirectly heating the carbon / carbon heaters by heating the graphite heater by electrifying, keeping recording the temperature of the carbon / carbon heaters and the resistance between the positive and negative lead electrodes II during heating and drawing the resistance change rate curves of the carbon / carbon heaters from normal temperature to high temperature, wherein, the resistance is measured by the corresponding Kelvin bridge. To sum up, the method of the invention is simple in steps, easy in operation and good in testing effects, can simultaneously test the high temperature resistance of a plurality of carbon / carbon heaters and is convenient for comparative analysis.

Description

technical field [0001] The invention belongs to the technical field of testing carbon / carbon composite heating element materials for polysilicon hydrogenation furnaces, and in particular relates to an indirect heating method for testing the high-temperature resistance of carbon / carbon heating elements. Background technique [0002] The rapid development of the microelectronics industry represented by integrated circuits and the rapid development of the solar photovoltaic industry since 2004 have greatly stimulated the market sales of polysilicon used in the semiconductor industry. In the production of polysilicon, a large amount of tail gas is generated. If it is hydrotreated, the tail gas can be treated and reused. In polysilicon hydrogenation equipment (hydrogenation furnace), carbon / carbon composite materials are basically used as materials for heat generation, heat insulation, and heat preservation (so-called carbon / carbon thermal field materials). Carbon / carbon composi...

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Problems solved by technology

The high-temperature resistance test parameters of the carbon / carbon composite heating element are important indicators for determining the equipment selection of polysilicon enterprises. Due to the difficulty of testing the high-temperature resistance test parameters of the above-mentioned carbon / carbon composite heating element, it is now very difficult to test the domestic carbon / carbon composite heating elements. Manufacturers of carbon composite materials have not been able to provide a set of effective reference data

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