Chemical mechanical polishing composite of stainless steel surface polishing
A polishing composition and surface polishing technology, applied to polishing compositions containing abrasives, etc., can solve the problems of poor polishing ability, poor abrasive dispersion, poor composition stability, etc., achieve good uniformity, and promote mechanical polishing. Ability, the effect of preventing agglomeration
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[0023] A chemical-mechanical polishing composition for stainless steel surface polishing, consisting of abrasives, accelerators, oxidizing agents, metal chelating agents, surfactants, and penetrating agents; the weight percentages of each component are as follows:
[0024] Abrasive 0.1-20% Accelerator 1-10%
[0025] Oxidant 1~15% Metal chelating agent 0.01~5%
[0026] Surfactant 0.01-5% Penetrant 0.01-1%.
[0027] The weight percent of each component described in the present invention is preferably as follows:
[0028] Abrasive 1~10% Accelerator 1~10%
[0029] Oxidant 5-10% Metal chelating agent 0.1-1%
[0030] Surfactant 0.1-1% Penetrant 0.1-0.5%.
[0031] The abrasive contains at least one or more mixtures of α-alumina, δ-alumina, γ-alumina, and θ-alumina, and the average particle size of the abrasive is between 100 and 1000 nm, preferably between 200 and 600 nm. Between, the abrasive is preferably α-alumina.
[0032] The polishing accelerator is one or a mixture of tw...
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