Method for synthesizing gallium phosphide polycrystal

Abstract

The invention discloses a method for synthesizing a gallium phosphide polycrystal, which comprises the following steps of: charging nitrogen into a chamber of a synthetic furnace, heating, and maintaining a nitrogen pressure in the furnace to between 20 and 30 bar; raising the temperature of a phosphorus furnace to between 480 and 520 DEG C, raising the temperature of the furnace to between 700 and 800 DEG C, increasing the current in an induction coil to between 40 and 150 A, wherein the voltage control of the induction coil is controlled in 5-15V and the frequency modulation in 10-20KHz, modulating the frequency to between 10 and 20 KHz and raising the temperature of an induction area; and moving a quartz tube reactor in the induction coil at a speed of 6.5cm / h, simultaneously raising the temperature of the phosphorus furnace at a speed of 10 to 35 DEG C / h and performing a gallium phosphide synthesizing process. After the gallium phosphide synthesizing process is completed, the frequency of the induction coil is slowly reduced to zero from the highest value and then the pressure of the synthetic furnace is released. By adopting a medium high-frequency heating way to synthesize the gallium phosphide, the method for synthesizing the gallium phosphide polycrystal greatly decreases tube exploding times in the gallium phosphide polycrystal synthesizing process, improves the yield and quality of the gallium phosphide polycrystal and does not easily generate an electrode spark phenomenon and strong electromagnetic radiation.

Description

technical field [0001] The invention relates to a heating synthesis process, in particular to a gallium phosphide polycrystal synthesis method. Background technique [0002] Gallium phosphide single crystals are drawn from synthesized gallium phosphide polycrystals. The synthesis of gallium phosphide polycrystalline is carried out in a sealed quartz reaction tube. In the process of synthesizing gallium phosphide polycrystalline, the quartz reaction tube will generate relatively high pressure due to the gasification of phosphorus. At present, the general practice is to balance the pressure inside and outside the quartz reaction tube by controlling the pressure outside the quartz reaction tube, so as not to Fry tube. However, at present, in the process of traditionally synthesizing gallium phosphide polycrystals, ultra-high frequency heating is usually used. This heating method uses a high-frequency oscillating tube. When it reaches 200-300kHz, strong electromagnetic radiat...

AI Technical Summary

Problems solved by technology

However, at present, in the process of traditionally synthesizing gallium phosphide polycrystals, ultra-high frequency heating is usually used. This heating method uses a high-frequency oscillating tube. When it reaches 200~300kHz, it will produce strong electromagnetic radiation, which will cause harm to human health.

Moreover, it can be seen from practice that this traditional ultra-high frequency heating method for synthesizing gallium phosphide polycrystals is prone to tube explosion, the synthesized gallium phosphide polycrystals have low transparency, and electrodes are prone to appear in high-temperature and high-humidity environments. In the case of ignition, the high-frequency oscillation tube is also easily damaged

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