Measurement method of thickness of subsurface damaged layer of bucky optical material
A technology of subsurface damage and optical materials, applied in the direction of measuring devices, using optical devices, and material analysis using radiation diffraction, etc., can solve problems such as unexplained measurements, unintuitive image processing results, and practical applications that are not suitable for engineering. Achieve strong engineering applicability and high precision
Inactive Publication Date: 2010-03-17
XI AN JIAOTONG UNIV
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The invention discloses a measurement method of the thickness of a subsurface damaged layer of a bucky optical material. The measurement method comprises the following steps: processing the surface ofa sample by a magneto rheological process to form a specific cutting plane; cutting the subsurface damaged layer and reflecting a subsurface damage to the cutting plane; processing the cutting planewith a corrosive chemical agent to expose and amplify subsurface cracks on the cutting plane; measuring roughness values of different positions on the cutting plane by a roughness measurement tool toobtain a roughness value change curve; working out a height difference between a critical point or a climax and a starting point recorded in measurement process, or a height difference between two points projected on an original surface, i.e. the thickness d of the subsurface damaged layer of the sample, wherein the critical point or climax to level off is obtained from a roughness curve by the data processing. The measurement method can quickly and accurately measure optical samples of multiple surface shapes and multiple materials and can realize heavy-calibre and engineered application.
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