Measurement method of thickness of subsurface damaged layer of bucky optical material

A technology of subsurface damage and optical materials, applied in the direction of measuring devices, using optical devices, and material analysis using radiation diffraction, etc., can solve problems such as unexplained measurements, unintuitive image processing results, and practical applications that are not suitable for engineering. Achieve strong engineering applicability and high precision

Inactive Publication Date: 2010-03-17
XI AN JIAOTONG UNIV
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  • Claims
  • Application Information

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Problems solved by technology

Since this method needs to use an optical microscope to observe the inclined surface of magnetorheological polishing, it is complicated to use and debug the optical microscope, and there is a certain size limit on the size of

Method used

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  • Measurement method of thickness of subsurface damaged layer of bucky optical material
  • Measurement method of thickness of subsurface damaged layer of bucky optical material
  • Measurement method of thickness of subsurface damaged layer of bucky optical material

Examples

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Example Embodiment

[0031] Example 1

[0032] figure 2 , image 3 A processing example of a flat sample of optical glass is shown. Measurement of subsurface damage layer thickness of a K9 optical glass flat sample: in image 3 Step1: Perform sub-surface damage detection on the optical surface after grinding with W20 abrasive grains for 20 minutes: such as image 3 As shown in Step 2, a tiny slope with an inclination angle of θ=6' is processed by the magnetorheological polishing process ( figure 2 ), along the direction of magnetorheological polishing indicated by the arrow, the profile information at different depths from the original plane can be reflected on the inclined plane. The inclined surface after magnetorheological polishing is treated with HF acid etching agent to clean the surface and further expose and enlarge the cracks on the inclined surface. Use the roughness profiler to scan from the dashed line near the start boundary of the slope ( figure 2 , image 3 Step3), feed al...

Example Embodiment

[0034] Example 2

[0035] like Image 6 A specific measurement example of the thickness of the subsurface damage layer of an optical ceramic spherical mirror is shown in Image 6 In Step 1, the optical surface after 20min grinding with W40 abrasive grains is subjected to sub-surface damage detection: such as Image 6 As shown in Step 2: Using the magnetorheological polishing process, a detection circular plane is thrown on a spherical sample with a radius of curvature R, and its horizontal radius is r. The cutting plane and the original spherical surface form a spherical crown ( Image 6 Step2), the circumference of the plane is shallow from the original surface, and the center of the circle is deep from the original surface. The cutting plane is treated with corrosive chemical reagents to amplify the exposure of subsurface cracks on the cutting plane; Image 6 In Step3 and Step4: use the white light interferometer to scan the point P at the circumference of the cut-out ci...

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Abstract

The invention discloses a measurement method of the thickness of a subsurface damaged layer of a bucky optical material. The measurement method comprises the following steps: processing the surface ofa sample by a magneto rheological process to form a specific cutting plane; cutting the subsurface damaged layer and reflecting a subsurface damage to the cutting plane; processing the cutting planewith a corrosive chemical agent to expose and amplify subsurface cracks on the cutting plane; measuring roughness values of different positions on the cutting plane by a roughness measurement tool toobtain a roughness value change curve; working out a height difference between a critical point or a climax and a starting point recorded in measurement process, or a height difference between two points projected on an original surface, i.e. the thickness d of the subsurface damaged layer of the sample, wherein the critical point or climax to level off is obtained from a roughness curve by the data processing. The measurement method can quickly and accurately measure optical samples of multiple surface shapes and multiple materials and can realize heavy-calibre and engineered application.

Description

technical field [0001] The invention relates to a method for measuring the thickness of a subsurface damaged layer of a hard and brittle optical material, which is used for measuring various optical elements ranging from plane to spherical and aspherical surfaces. The method can amplify the subsurface damage of hard and brittle optical materials, and can realize the measurement of the thickness of the tiny subsurface damage layer caused by ultra-precision grinding. Background technique [0002] At present, the existing method for measuring subsurface damage of hard and brittle optical materials is more accurate with magnetorheological polishing technology combined with optical microscope observation of inclined surfaces, such as: literature Suratwala T I, Wong L L, Miller P E et al., Sub-surface mechanical damage distribution during Grinding of fused silica [J]. Journal of Non-Crystalline Solids, 2006, 352: 5601-5617. The measurement material is a commonly used flat optical...

Claims

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Application Information

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IPC IPC(8): G01B11/06G01B11/30G01N23/20G01N1/32
Inventor 王海容陈灿任军强孙国良苑国英蒋庄德
Owner XI AN JIAOTONG UNIV
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