Intermediate infrared antimonide laser device structure adopting DWELL
A technology of antimonides and lasers, which is applied to lasers, laser components, semiconductor lasers, etc., can solve problems such as difficulty, affecting device performance, and low efficiency of a single quantum dot layer, so as to improve efficiency, improve overall performance, and improve electro-optic The effect of conversion efficiency
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[0009] Such as figure 1 As shown, a mid-infrared antimonide laser structure using DWELL includes: n-type GaSb substrate (1), n-type GaSb buffer layer (2), n-type Al 0.9 Ga 0.1 As 0.03 Sb 0.97 Lower confinement layer (3), n-type Al 0.3 Ga 0.7 As 0.02 Sb 0.98 Lower waveguide layer (4), DWELL layer (5), DWELL layer (5) including barrier layer Al 0.3 Ga 0.7 As 0.02 Sb 0.98 (6), the quantum well layer In 0.2 Ga 0.8 As 0.02 Sb 0.98 (7), InGaSb quantum dot layer (8), p-type Al 0.3 Ga 0.7 As 0.02 Sb 0.98 Upper waveguide layer (9), p-type Al 0.9 Ga 0.1 As 0.03 Sb 0.97 The upper confinement layer (10), the p+ type GaSb ohmic layer (11). The substrate (1) is the base for material epitaxial growth, using a Te-doped GaSb substrate; growing a 0.5μm Te-doped GaSb buffer layer (2); the lower confinement layer is Al with a thickness of 1.2μm and an Al content of 0.9 0.9 Ga 0.1 As 0.03 Sb 0.97 Layer (3); the lower waveguide layer is Al with a thickness of 0.35μm and an Al content of 0.3 0.3 Ga 0.7...
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