This application provides a cavity-enhanced mid-
infrared photothermal
vibration measurement system and method, relating to the field of photothermal vibration spectrum detection of materials, aiming to improve the accuracy and sensitivity of detection. The measurement
system includes a cavity-enhanced substrate, a mid-
infrared laser, a
laser vibrometer, and a lock-in
amplifier. The cavity-enhanced substrate includes a substrate and an asymmetric Fabry-Perot
resonator. The asymmetric Fabry-Perot
resonator includes a
reflective layer, an intermediate
dielectric layer, and a layer to be tested, sequentially stacked on the substrate. The mid-
infrared laser applies mid-infrared
laser light to the layer to be tested, causing the layer to generate a photothermal vibration
signal. The laser vibrometer detects the photothermal vibration
signal and converts it into a detection electrical
signal. The lock-in
amplifier extracts the detection electrical signal to determine the photothermal vibration spectrum of the layer to be tested. The ratio of the thickness of the intermediate
dielectric layer to the thickness of the layer to be tested ranges from 0.8 to 10. The
refractive index of the material of the layer to be tested is less than the
refractive index of the material of the intermediate
dielectric layer, but greater than the
refractive index of air.