Filtering phase discriminator type dynamic interferometry system

A dynamic interferometric measurement system technology, applied in the field of optical interferometric measurement systems, can solve problems such as increasing measurement time and reducing resolution, and achieves the effects of eliminating high-frequency interference, simple phase shifting, and high precision

Inactive Publication Date: 2011-08-31
CHONGQING NORMAL UNIVERSITY
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

However, there are problems such as the reduction of resolution; the resolution is improved through the algorithm, and the measurement time is increased.

Method used

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  • Filtering phase discriminator type dynamic interferometry system
  • Filtering phase discriminator type dynamic interferometry system
  • Filtering phase discriminator type dynamic interferometry system

Examples

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Embodiment Construction

[0017] In order to further illustrate the above-mentioned purpose, technical scheme and effect of the present invention, the invention will be described in detail below through examples in conjunction with the above-mentioned figures. Please see first figure 1 As shown, it is a vibration-resistant Fizeau interferometry device.

[0018] Among them, the laser is used as the light source 1, and it and the beam splitter 2, the collimating beam expander mirror 3, the reference mirror 4, the phase shifting device 5 (PZT1, PZT2, PZT3), the measured object 6, the diaphragm 7, the lens 8, and the CCD Photodetectors 9 are sequentially placed in the optical path.

[0019] The light emitted by the laser passes through the beam splitter 2, the collimating beam expander mirror 3, and the reference mirror 4 in turn, and is projected onto the surface of the object 6 to be measured. The reflected light passes through the reference mirror 4 and meets the reflected light from the front surface ...

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Abstract

The invention relates to a filtering phase discriminator type dynamic interferometry system, which is composed of an interference optical system, a photoelectric detector and a filtering phase discriminator system for performing optical interference measurement on the object to be detected. The optical interference system comprises light paths and a phase shifting device, and the filtering phase discriminator system is composed of a synchronic phase shift control circuit and a signal processing circuit. The measurement system provided by the invention can perform on-line measurement in severeenvironment, can obtain the measurement result only needing an interference graph, does not lower CCD resolution ratio and has no special requirement on measurement environment, and has the characteristics of strong interference resistance, high measurement precision, high signal noise ratio, high resolution ratio, short measurement time and the like.

Description

technical field [0001] The invention relates to an optical interferometry system for real-time obtaining of the detected surface topography, in particular to a dynamic interferometry system for dynamic surface topography detection. Specifically, the invention relates to an anti-vibration real-time interferometry system, which eliminates the external interference of the time-domain interferometer and the error introduced by the phase shifter. Background technique [0002] In the fields of optical component production, surface processing of integrated circuit silicon wafers, biomedicine, and precision manufacturing, surface topography has a major impact on device performance, yield, life, etc., and even affects human health. In recent years, there has been an increasing demand for online (real-time) optical interferometry of objects to be inspected that move in manufacturing production lines. For example, it is used for on-line measurement in the manufacture of thin film mate...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01B9/02G01B9/023G01B11/24
Inventor 何国田曾智龙兴明马燕曾毅冉迎春张德胜
Owner CHONGQING NORMAL UNIVERSITY
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