Method for magnetron sputtering deposition of aluminum film for surface protection of NdFeB workpiece

Abstract

The invention relates to a method for magnetron sputtering deposition of an aluminum film for surface protection of an NdFeB workpiece, which is characterized in that the method comprises the following steps: (1) mounting an aluminum target with the purity being more than 98% in a vacuum chamber, and leading the angle between the aluminum target and the horizontal line to be 45 degrees-90 degrees; (2) carrying out de-oiling and derusting treatment on the NdFeB workpiece; (3) placing the NdFeB workpiece on a bracket of the workpiece; (4) carrying out vacuum-pumping, and leading the vacuum degree in the vacuum chamber to be not more than 1 multiplied by 10-3Pa; (5) carrying out the magnetron sputtering deposition of the aluminum film on the NdFeB workpiece, adopting inert gas as working gas, keeping the working pressure at 0.1-10Pa, leading the sputtering power of unit target area to be 1-6w / cm2, adopting at least one aluminum target for carrying out the sputtering on the NdFeB workpiece and keeping the sputtering time to be 1-5h; (6) adopting a manual mechanical hand to overturn the NdFeB workpiece; and (7) carrying out the sputtering deposition on the NdFeB workpiece, adopting theinert gas as the working gas, keeping the working pressure at 0.1-10Pa, leading the sputtering power of the unit target area to be 1-6w / cm2, adopting at least one sputtering target for carrying out the sputtering on the NdFeB workpiece, and keeping the sputtering time to be 1-5h.

Description

technical field [0001] The invention relates to a method for depositing an aluminum film by magnetron sputtering for surface protection of NdFeB workpieces. Background technique [0002] Rare earth NdFeB permanent magnet materials have attracted widespread attention due to their excellent magnetic properties and high cost performance, and play an important role in various fields of the national economy. However, NdFeB itself is a multi-phase structure, and the electrochemical potential of each phase is different. It makes NdFeB extremely easy to corrode in acidic, salt spray environment and humid air. The use of surface protection is an effective method to improve the corrosion performance of NdFeB permanent magnet materials. At present, the most commonly used surface protection technology is electroplating, but the surface of the electroplating layer is rough and the bonding force is poor, which limits the application of electroplating products in some harsh environments, ...

AI Technical Summary

Problems solved by technology

In addition, the background vacuum degree of the vacuum chamber, the time for cleaning the NdFeB sample, and the time for cleaning the aluminum target will also affect the performance of the film.

However, there is no reasonable method for depositing aluminum film by magnetron sputtering at present, which can prepare uniform, dense and excellent corrosion resistance aluminum film on all the outer surfaces of NdFeB workpieces.

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