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Method for preparing conductive composite atomic oxygen protective coating ITO/MgF2

A composite atom and protective coating technology, which is applied in the field of aerospace, can solve problems such as microcracks, easy accumulation of static electricity, atomic oxygen erosion, etc., and achieve good protection performance, good flexibility, and improved work efficiency.

Active Publication Date: 2011-07-20
NO 510 INST THE FIFTH RES INST OFCHINA AEROSPAE SCI & TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0006] The purpose of the present invention is to solve the problem that the existing atomic oxygen protective coating is easy to accumulate static electricity, brittle, prone to microcracks, and thus easily corroded by atomic oxygen, and proposes a conductive composite atomic oxygen protective coating ITO / MgF 2 The preparation method, the prepared ITO / MgF 2 MgF in Conductive Composite Atom Oxygen Protective Coating 2 The mass fraction is 7% to 9%, and the surface resistivity is less than or equal to 10 9 Ω / m 2

Method used

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Examples

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Embodiment 1

[0021] (1) Preparation of diameter 100mm, thickness 10mm, In 2 o 3 The mole percentage is 91%, SnO 2 The molar percentage is 9% of the ITO target;

[0022] (2) Prepare 4 pieces of MgF with a diameter of 100mm and a sector angle of 20° 2 Flake material, MgF 2 The purity is 99.9%;

[0023] (3) MgF was coated with conductive glue 2 The sheet material is evenly pasted on the ITO target;

[0024] (4) The ITO / MgF prepared in (3) 2 The composite target is installed on the target base of the magnetron sputtering equipment, and the magnetron sputtering equipment is vacuumed to 2×10 -3 Pa, then enter Ar gas, turn on the power supply of the magnetron sputtering target, the target surface will generate glow discharge, and the Ar ion flow will affect the ITO / MgF 2 The target is bombarded, and ITO and MgF are sputtered from the target surface 2 , deposited on a Kapton substrate to obtain ITO / MgF 2 Conductive composite atomic oxygen protective coating; the deposition discharge powe...

Embodiment 2

[0028] (1) Preparation of diameter 100mm, thickness 10mm, In 2 o 3 The mole percentage is 91%, SnO 2 The molar percentage is 9% of the ITO target;

[0029] (2) Prepare 6 pieces of MgF with a diameter of 100mm and a sector angle of 15° 2 Flake material, MgF 2 The purity is 99.9%;

[0030] (3) MgF was coated with conductive glue 2 The sheet material is evenly pasted on the ITO target;

[0031] (4) The ITO / MgF prepared in (3) 2 The composite target is installed on the target base of the magnetron sputtering equipment, and the magnetron sputtering equipment is vacuumed to 2×10 -3 Pa, then enter Ar gas, turn on the power supply of the magnetron sputtering target, the target surface will generate glow discharge, and the Ar ion flow will affect the ITO / MgF 2 The target is bombarded, and ITO and MgF are sputtered from the target surface 2 , deposited on a Kapton substrate to obtain ITO / MgF 2 Conductive composite atomic oxygen protective coating; the deposition discharge powe...

Embodiment 3

[0035] (1) Preparation of diameter 100mm, thickness 10mm, In 2 o 3 The mole percentage is 91%, SnO 2The molar percentage is 9% of the ITO target;

[0036] (2) Prepare 5 pieces of MgF with a diameter of 100mm and a sector angle of 20° 2 Flake material, MgF 2 The purity is 99.9%;

[0037] (3) MgF was coated with conductive glue 2 The sheet material is evenly pasted on the ITO target;

[0038] (4) The ITO / MgF prepared in (3) 2 The composite target is installed on the target base of the magnetron sputtering equipment, and the magnetron sputtering equipment is vacuumed to 2×10 -3 Pa, then enter the Ar gas, turn on the power supply of the magnetron sputtering target, the target surface will generate a glow discharge, and the Ar ion flow will affect the ITO / MgF 2 The target is bombarded, and ITO and MgF are sputtered from the target surface 2 , deposited on a Kapton substrate to obtain ITO / MgF 2 Conductive composite atomic oxygen protective coating; the deposition discharge...

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Abstract

The invention relates to a method for preparing a conductive composite atomic oxygen protective coating ITO / MgF2, in particular to a magnetron sputtering method for preparing the ITO / MgF2 conductive composite coating by using a composite target to realize the atomic oxygen protection of base materials, and belongs to the technical field of aerospace. The method comprises the following steps of: uniformly adhering MgF2 flaky materials on an ITO target by using conductive adhesive; and then arranging the ITO / MgF2 composite target on a target holder of magnetron sputtering equipment to obtain the ITO / MgF2 conductive composite atomic oxygen protective coating. The ITO / MgF2 conductive composite atomic oxygen protective coating has the advantages that: the coating has good protective property and electric conductivity and does not accumulate static electricity in a space plasma environment; the ITO / MgF2 composite coating has good flexibility and obvious advantage when applied to the surfaces needing to be wound, such as the surface of a flexible thin film; and the ITO / MgF2 composite coating has an anti-reflection effect on ray and can improve the working efficiency when applied to optical devices.

Description

technical field [0001] The invention relates to a conductive composite atomic oxygen protective coating ITO / MgF 2 The preparation method, especially the preparation of ITO / MgF with a composite target by magnetron sputtering 2 A conductive composite coating is used to realize the atomic oxygen protection of a base material, and belongs to the technical field of aerospace. Background technique [0002] The spacecraft operates in the space plasma environment, in which the atomic oxygen has high energy and flux, and its chemical properties are very active. Atomic oxygen has a strong oxidizing and corrosive effect on the surface materials of spacecraft, which will cause thinning, deformation, and strength reduction of structural materials, change the optical properties of optical devices, change the optical properties of thermal control coatings, and lead to thermal control failure . These effects significantly affect the working performance and service life of the spacecraft....

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C23C14/35C23C14/06
Inventor 李中华郑阔海赵琳
Owner NO 510 INST THE FIFTH RES INST OFCHINA AEROSPAE SCI & TECH
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