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Calibration method of quartz crystal microbalance

A technology of microbalance and quartz crystal, which is applied in the aerospace field, can solve problems such as the sensitivity calibration of quartz crystal microbalance, and achieve the effects of stable test process, improved sensitivity, and stable and reliable test process

Active Publication Date: 2010-06-23
NO 510 INST THE FIFTH RES INST OFCHINA AEROSPAE SCI & TECH
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  • Abstract
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Problems solved by technology

[0005] The purpose of the present invention is to solve the problem of sensitivity calibration of quartz crystal microbalances in the production and application process, and propose a calibration method for quartz crystal microbalances

Method used

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  • Calibration method of quartz crystal microbalance
  • Calibration method of quartz crystal microbalance

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Experimental program
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Embodiment

[0034] 1) In the test method, the gold target 7 is placed in the vacuum chamber 9, and the quartz crystal microbalance detector 4 is placed at the same time. Electrical and gas auxiliary equipment, adjust the balance communication, and close the vacuum chamber 9, and observe the state of the experimental equipment through the observation window of the vacuum chamber.

[0035] 2) Turn on the vacuum pumping system 3, proceed in the manner of starting the cold trap, starting the mechanical pump, and starting the molecular pump until the vacuum degree of the system is less than 1×10 -3 Pa, observe the state of the experimental equipment through the observation window of the vacuum chamber.

[0036] 3) Turn on the gas supply bottle 2 until the vacuum degree of the system is 1×10 -1 Pa, turn on the sputtering equipment through the magnetron sputtering switch 11, monitor the vacuum degree of the vacuum chamber, and turn off the magnetron sputtering switch 11 after 30 minutes of the ...

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Abstract

The invention relates to a calibration method of a quartz crystal microbalance, belonging to the technical field of aeronautics and astronautics. The method comprises depositing heavy metal gold at the surface of the quartz crystal microbalance by using a magnetron sputtering device; injecting an inert gas in a vacuum system; observing and recording the vacuum degree of a vacuum chamber; monitoring and storing the frequency value and the temperature value of the quartz crystal microbalance; monitoring and storing the S polarized light current and P polarized light current of ellipsometry system, and finally closing the testing system, closing the gas charging system of inert gas, and closing the vacuum system. The method improves the sensibility of precision measurement of the quartz crystal microbalance; the test procedure is stable and reliable, and has good replicability; an ellipsometry film thickness measuring apparatus is used for providing direct film thickness measuring method for the quartz crystal microbalance; and the method has high measuring accuracy, stable test procedure and good replicability.

Description

technical field [0001] The invention relates to a calibration method for a quartz crystal microbalance, which belongs to the technical field of aerospace. Background technique [0002] According to relevant theoretical research, Sauerbrey proposed the theoretical relationship between the resonant frequency of quartz crystal and the surface quality of the crystal. With the development of quartz crystal technology and the deepening of its application, it is necessary to calibrate the sensitivity of the piezoelectric quartz crystal material frequency to the quality change. Urgent. With the development of crystal oscillator technology, many quartz crystals have been developed as measuring instruments for sensors, which have been widely used in scientific research and industrial production. [0003] Quartz crystal microbalance (QCM for short) is a high-precision mass measuring instrument that uses a quartz wafer as a sensor. There are many types of quartz crystal microbalances ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01G23/01
Inventor 颜则东王先荣王鷁姚日剑柏树冯杰
Owner NO 510 INST THE FIFTH RES INST OFCHINA AEROSPAE SCI & TECH
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