Calibration method of quartz crystal microbalance

A technology of microbalance and quartz crystal, which is applied in the aerospace field, can solve problems such as the sensitivity calibration of quartz crystal microbalance, and achieve the effects of stable test process, improved sensitivity, and stable and reliable test process
CN101750140AActive Publication Date: 2010-06-23NO 510 INST THE FIFTH RES INST OFCHINA AEROSPAE SCI & TECH
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Patent Information

Authority / Receiving Office
CN Β· China
Patent Type
Applications(China)
Current Assignee / Owner
NO 510 INST THE FIFTH RES INST OFCHINA AEROSPAE SCI & TECH
Publication Date
2010-06-23

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Abstract

The invention relates to a calibration method of a quartz crystal microbalance, belonging to the technical field of aeronautics and astronautics. The method comprises depositing heavy metal gold at the surface of the quartz crystal microbalance by using a magnetron sputtering device; injecting an inert gas in a vacuum system; observing and recording the vacuum degree of a vacuum chamber; monitoring and storing the frequency value and the temperature value of the quartz crystal microbalance; monitoring and storing the S polarized light current and P polarized light current of ellipsometry system, and finally closing the testing system, closing the gas charging system of inert gas, and closing the vacuum system. The method improves the sensibility of precision measurement of the quartz crystal microbalance; the test procedure is stable and reliable, and has good replicability; an ellipsometry film thickness measuring apparatus is used for providing direct film thickness measuring method for the quartz crystal microbalance; and the method has high measuring accuracy, stable test procedure and good replicability.
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Description

technical field

[0001] The invention relates to a calibration method for a quartz crystal microbalance, which belongs to the technical field of aerospace. Background technique

[0002] According to relevant theoretical research, Sauerbrey proposed the theoretical relationship between the resonant frequency of quartz crystal and the surface quality of the crystal. With the development of quartz crystal technology and the deepening of its application, it is necessary to calibrate the sensitivity of the piezoelectric quartz crystal material frequency to the quality change. Urgent. With the development of crystal oscillator technology, many quartz crystals have been developed as measuring instruments for sensors, which have been widely used in scientific research and industrial production.

[0003] Quartz crystal microbalance (QCM for short) is a high-precision mass measuring instrument that uses a quartz wafer as a sensor. There are many types of quartz crystal microbalances ...

Claims

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