Design and deposition of sensing layers for surface acoustic wave chemical sensors based on supra-molecular chemistry

一种化学传感器、表面声波的技术，应用在科学仪器、使用声波/超声波/次声波分析流体、使用声波/超声波/次声波进行材料分析等方向，能够解决浪费、光刻工艺费用高等问题

Inactive Publication Date: 2010-07-21
HONEYWELL INT INC
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

Finally there is a need for new low-cost techniques for fabricating SAW chemical sensors without a lithographic process, which is expensive and can waste large amounts of material that should be removed by etching from unwanted areas

Method used

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  • Design and deposition of sensing layers for surface acoustic wave chemical sensors based on supra-molecular chemistry
  • Design and deposition of sensing layers for surface acoustic wave chemical sensors based on supra-molecular chemistry
  • Design and deposition of sensing layers for surface acoustic wave chemical sensors based on supra-molecular chemistry

Examples

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Embodiment Construction

[0042] Specific values ​​and configurations discussed in these non-limiting examples may vary, and are mentioned merely to illustrate at least one embodiment and are not intended to limit the scope thereof.

[0043] Look figure 1 , which shows a schematic diagram 100 of an organic sensing film in which a macrocycle is covalently bonded to a piezoelectric substrate according to a preferred embodiment. Such as figure 1 As shown in , an organic sensing film 140 containing a functionalized macrocycle 130 can be covalently bonded to a piezoelectric substrate 120 . For SAW / BAW sensing applications, the thin coating of solid organic sensing membrane 140 may be a functionalized macrocycle 130 that forms a covalent bond 110 with a piezoelectric substrate 120, which preferably Supplied as a quartz substrate.

[0044] Functionalized macrocycles 130 can be, for example, α, β, γ modified cyclodextrins (e.g., sulfonated cyclodextrins, aminocyclodextrins), calix[n]arenes and crown ethers,...

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Abstract

The design and deposition of a sensing layer for room temperature SAW / BAW chemical sensors utilizing macrocyclic compounds in accordance with supra-molecular chemistry principles. The gas to be sensed is attached to the organic sensing film thus changing its visco-elastic properties and creating a mass increase of the film deposited on the surface of SAW / BAW devices. A direct printing method can be used as an additive, mask-less procedure to deposit metallic interdigital transducers and electrodes required for SAW / BAW devices, along with the deposition of a guiding layer and the organic filmsonly on the location required by the sensing SAW / BAW principle of the sensor. Different thermal treatment solutions can be used for the consolidation of the gelly organic films deposited by the direct printing methods.

Description

technical field [0001] Embodiments generally relate to SAW / BAW (Surface Acoustic Wave / Bulk Acoustic Wave) chemical sensors. Embodiments also relate to designing and depositing organic sensing layers used in surface acoustic wave chemical sensors based on supramolecular chemistry. Embodiments also relate to direct printing methods to achieve SAW-based chemical sensors. Background of the invention [0002] Gas detection at low temperature and low power consumption is a major concern in the field of chemical sensors mainly used in the context of wireless detection applications. In many gas sensing industrial applications, such as metal oxide-based chemistors such as SnO-based 2 Those that can be used to detect reducing gases (such as H 2 , CO, CH 4 ) and oxidizing gases (such as NO X ). For example, SnO 2 The resistance of the gas sensor may be affected by the NO in the presence of oxidizing gases X The charge transfer reaction between the gas and the metal oxide involv...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01N29/02G01N29/24H03H9/25B81B3/00
CPCG01N29/022G01N2291/021G01N2291/0423B81B2201/0214G01N29/2462B81C1/00206
Inventor B·C·塞尔班V·V·阿夫拉梅斯库C·P·科比亚努I·乔治斯库N·瓦拉秋
Owner HONEYWELL INT INC
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