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Purification method of 7N electronic grade hyperpure ammonia

A purification method and ultra-pure ammonia technology, which are applied in the field of 7N electronic-grade ultra-pure ammonia purification method and purification devices, can solve the problems of increasing the energy consumption of ammonia purification production, device harm, and inability to remove it.

Inactive Publication Date: 2010-09-01
SUZHOU JINHONG GAS CO LTD
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

The disadvantages of this process are: 1.CaC 2 Contains impurities such as calcium phosphide, calcium arsenide and sulfide, which will be hydrolyzed to form PH when they meet water. 3 , AsH 3 、H 2 S, etc. form secondary pollution, which cannot be removed in the subsequent separation, and these impurities are very harmful to the device
[0009] 2. CaC 2 The reaction temperature with trace water should rise above 80°C, which greatly increases the energy consumption in ammonia purification production
This process cannot get 7N grade ultra-pure ammonia

Method used

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  • Purification method of 7N electronic grade hyperpure ammonia
  • Purification method of 7N electronic grade hyperpure ammonia
  • Purification method of 7N electronic grade hyperpure ammonia

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Embodiment Construction

[0021] Hereinafter, the present invention will be described with reference to the drawings.

[0022] The purity of raw material industrial liquid ammonia in the present invention is 99.8%, wherein water content2 2 +Ar2 4 3 / h.

[0023] Such as figure 1 As shown, the industrial liquefied ammonia in the storage tank 1 filled with liquefied ammonia is sent into the vaporizer 3-1 or 3-2 through the liquefied ammonia pump 2, and after being vaporized, the oil in the ammonia is removed through the oil remover 4 and the adsorption drier 5 successively. After the water enters the rectification tower 6. During the rectification process, the rising steam in the tower will discharge the low-boiling point H through the condenser 7-1. 2 , O 2 , N 2 、CH 4 Wait for non-condensable gas, the cold capacity of condenser 7-1 and 7-2 is provided by refrigerator. The bottom of the rectification tower is connected to a reboiler 8, which can vaporize the reflux liquid ammonia, and remove high-b...

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Abstract

The invention discloses a purification method of 7N electronic grade hyperpure ammonia. The hyperpure ammonia the NH3 purity of which is higher than 99.99999 percent can be obtained by carrying out the processing steps of intermittent vaporization, oil removing, deep dehydration and adsorption drying, light and heavy component separation with a ppb grade rectifying column and terminal purification on raw material liquid ammonia, and the hyperpure ammonia can be widely applied to industries of semiconductor integrated circuits IC, liquid crystal displays LED, semiconductor luminescent devices LED (light-emitting diode) and solar batteries PV and the like.

Description

technical field [0001] The invention relates to a gas purification method and device, in particular to a purification method of 7N electronic grade ultra-pure ammonia and a purification device thereof. Background technique [0002] Ultrapure ammonia is an important electron gas in the semiconductor industry, and it is widely used as an ideal nitrogen source in the manufacture of semiconductor and compound semiconductor devices. Its main application has the following three aspects: [0003] 1. In the manufacturing process of semiconductor light-emitting diode LED, TMGa trimethylgallium is used as gallium source and ultrapure ammonia is used as nitrogen source, and deposited on silicon or sapphire substrate in metal organic chemical vapor deposition (MOCVD) GaN film is used to prepare the core epitaxial components of LEDs. [0004] 2. In semiconductor integrated circuits, ultrapure ammonia is used as an ideal nitrogen source, and monosilane (SiH 4 ) or dichlorodihydrosilane...

Claims

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Application Information

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IPC IPC(8): C01C1/02
Inventor 金向华吴彦敏李英辉刘志军
Owner SUZHOU JINHONG GAS CO LTD
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