Surface acoustic wave resonant pressure sensor
A pressure sensor, surface acoustic wave technology, applied in the direction of measuring fluid pressure, measuring fluid pressure through electromagnetic components, instruments, etc., can solve the problems of low stability, poor reliability, low precision, etc., to improve repeatability and shorten lead wires , the effect of reducing interference
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[0016] Sensor embodiment: reference figure 1 The system composition of the specific implementation of the surface acoustic wave resonant pressure sensor proposed by the present invention is as described above, including resonators 1 and 2, low-noise monolithic integrated amplifiers 3 and 4, and the two resonators are respectively connected to the amplifier In the feedback loop, an oscillator with a certain output frequency is formed, the interdigital transducer 5, the double-balanced mixer 6, and the LC low-pass filter 7. The frequencies of the two outputs are mixed, low-pass filtered and amplified to obtain A difference frequency output corresponding to the applied pressure one by one.
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