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MEMS broadband piezoelectric energy collector based on PDMS film structure

A technology of thin film structure and piezoelectric energy, applied in piezoelectric effect/electrostrictive or magnetostrictive motors, electrical components, generators/motors, etc., can solve problems such as narrow working frequency band, and achieve easy production and low volume The effect of reduction and simple structure

Active Publication Date: 2013-02-06
SHANGHAI JIAOTONG UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0007] Aiming at the above-mentioned deficiencies in the prior art, the present invention provides a MEMS broadband piezoelectric energy harvester based on a PDMS film structure, so that the piezoelectric transducer element can obtain a larger output power in a low-frequency vibration environment to solve the problem of traditional MEMS Narrow working frequency band of piezoelectric energy harvester

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  • MEMS broadband piezoelectric energy collector based on PDMS film structure
  • MEMS broadband piezoelectric energy collector based on PDMS film structure

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Embodiment Construction

[0016] The embodiments of the present invention are described in detail below. This embodiment is implemented on the premise of the technical solution of the present invention, and detailed implementation methods and specific operating procedures are provided, but the protection scope of the present invention is not limited to the following implementation example.

[0017] Such as figure 1 As shown, this embodiment includes: a circular frame 1, a PDMS film 2 arranged in the circular frame, a piezoelectric cantilever beam 3 and a quality block 4, wherein: eight piezoelectric cantilever beams 3 are radially embedded in the PDMS film 2 and one end is fixed on the circular frame 1 and the other end is suspended, the mass block 4 is embedded in the PDMS film 2 and is located at the center of the circular frame 1.

[0018] The length of the piezoelectric cantilever beam 3 is smaller than the inner diameter of the circular frame 1;

[0019] The piezoelectric cantilever beams 3 are ...

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Abstract

The invention provides an MEMS broadband piezoelectric energy collector based on a PDMS film structure, belonging to the technical field of a micro electro mechanical system (MEMS). The collector comprises a round frame, a PDMS film, a plurality of piezoelectric cantilever beams and a mass block, wherein the PDMS film, the plurality of the piezoelectric cantilever beams and the mass block are arrange in the round frame, the plurality of the piezoelectric cantilever beams are embedded in the PDMS film in a radial direction, one end of each piezoelectric cantilever beam is fixed on the round frame and the other end thereof is suspended; and the mass block is embedded in the PDMS film and is arranged at the center of the round frame. The invention causes piezoelectric transducing elements to obtain a larger output power under the environment of low-frequency vibration, thereby solving the problem of narrow working band of the traditional MEMS piezoelectric energy collector.

Description

technical field [0001] The invention relates to a device in the technical field of micro-electromechanical systems, in particular to a MEMS broadband piezoelectric energy harvester based on a PDMS film structure. Background technique [0002] Micro-Electro-Mechanical Systems (MEMS: Micro-Electro-Mechanical Systems) refers to a micro-device or system that can be mass-produced and integrates micro-mechanisms, micro-sensors, micro-actuators, signal processing and control circuits, and interfaces, communications and power supplies. . MEMS is developed with the development of semiconductor integrated circuit microfabrication technology and ultra-precision machining technology. In order to solve the problem that traditional batteries are large in size and short in life, and cannot meet the long-life independent energy supply requirements of new technologies such as wireless sensor networks and embedded systems, MEMS-based energy harvesting technology can convert energy harvesting...

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H02N2/18
Inventor 刘景全马华安唐刚李以贵杨春生
Owner SHANGHAI JIAOTONG UNIV