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Passive anode of direct methanol fuel cell based on MEMS (Micro-electromechanical Systems) and manufacturing method thereof

A methanol fuel cell, passive technology, applied in battery electrodes, circuits, electrical components, etc., can solve the problems of difficult packaging, manufacturing, complex structure, etc., and achieve the effects of good compatibility, simple manufacturing process, and cost reduction.

Active Publication Date: 2013-01-30
TSINGHUA UNIV
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Problems solved by technology

However, due to the use of an independent hydrophobic film, it cannot be directly fabricated on the plate, making its structure complex and packaging relatively difficult

Method used

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  • Passive anode of direct methanol fuel cell based on MEMS (Micro-electromechanical Systems) and manufacturing method thereof
  • Passive anode of direct methanol fuel cell based on MEMS (Micro-electromechanical Systems) and manufacturing method thereof
  • Passive anode of direct methanol fuel cell based on MEMS (Micro-electromechanical Systems) and manufacturing method thereof

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Embodiment Construction

[0030] The present invention provides a passive anode structure of a direct methanol fuel cell based on MEMS technology and a manufacturing method thereof. The present invention will be further described below through the description of drawings and specific implementation methods.

[0031] Such as Figure 1(a)-Figure 1(d) and Figure 2(a)-Figure 2(d) As shown, the anode structure includes two silicon plates, a methanol storage plate 6 and a water storage plate 1, which are respectively used to store methanol and water; the front side of the methanol storage plate 6 is a methanol storage chamber 7, and the back side is provided with Methanol output hole 9, a layer of hydrophobized porous silicon membrane 10 is set between the methanol storage cavity 7 and the methanol output hole 9, to transmit methanol and inhibit the reverse transmission of water; the front of the water storage plate 1 is a water storage Cavity 3, the back is a plurality of elongated channels 5, and a layer ...

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Abstract

The invention relates to a passive anode of a direct methanol fuel cell based on an MEMS (Micro-electromechanical Systems) technology and a manufacturing method thereof, belonging to the technical field of micro-energy and micromechanical machining. The anode comprises two silicon pole plates of a methanol storing pole plate and a water storing pole plate which are respectively used for storing methanol and water; the front surface of the methanol storing pole plate is provided with a methanol storing cavity, the back surface thereof is provided with a methanol output hole, and a layer of hydrophobic porous silicon film is arranged between the methanol storing cavity and the methanol output hole to transfer the methanol and inhibit reverse transfer of water; the front surface of the water storing pole plate is the water storing cavity, the back surface thereof is provided with a plurality of strip-shaped channels, and a current collecting layer is arranged at the back surface of the water storing pole plate; and the back surface of the methanol storing pole plate and the front surface of the water storing pole plate are assembled together through a bonding process. The invention has simple manufacturing process and favorable compatibility with the traditional micro-process and is beneficial to integrating a battery with other systems; meanwhile, the porous silicon film has the advantages of capability of effectively controlling and regulating parameters, such as, area, thickness, pore diameter, porosity, hydrophobicity, and the like.

Description

technical field [0001] The invention belongs to the technical field of micro-energy and micro-machining, and in particular relates to a passive anode structure of a direct methanol fuel cell based on MEMS technology and a manufacturing method thereof. Background technique [0002] Direct methanol fuel cells convert the chemical energy of methanol directly into electrical energy. Compared with other micro-energy sources, it has the advantages of high energy density, room temperature operation, environmental protection, no moving parts, and easy fuel storage. Miniature direct methanol fuel cells are used in portable electronic devices (such as notebook computers, PDAs, digital cameras), wireless communication networks (such as mobile phones, GPS, sensor network nodes), microsystems (such as microsystems composed of system-on-chip, SOC, and MEMS devices) and so on have outstanding advantages. The micro-silicon-based direct methanol fuel cell produced by mature MEMS technology...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H01M4/86H01M4/88
CPCY02E60/50
Inventor 王晓红周彦安刘理天
Owner TSINGHUA UNIV
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