Process for producing color conversion filter
A manufacturing method and technology of color filters, applied in the fields of optical filters, semiconductor/solid-state device manufacturing, optics, etc., can solve problems such as cumbersome procedures and achieve the effect of reducing manufacturing costs
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[0068] A color mosaic (color mosaic) CK-7001 (available from Fujifilm Co., Ltd.) is coated on a transparent substrate 1 (1737 glass produced by Corning Co., Ltd.), and a black matrix 2 having a plurality of rectangular openings is formed by photolithography. . Black matrix 2 has a film thickness of 1 μm. Each of the rectangular openings (corresponding to sub-pixels) has a length of 300 μm×a width of 100 μm, and the interval between adjacent rectangular openings is 30 μm in the length and 10 μm in the width.
[0069] Next, apply photocurable acrylate resin (V259PA / P5, produced by Nippon Steel Chemical Co., Ltd.), and use photolithography to form a pattern. On the black matrix 2, a bank 4 consisting of a plurality of strips extending in the longitudinal direction is formed. , the strip-shaped portions constituting the embankment 4 have a width of 10 μm and a height of 5 μm, respectively.
[0070] Next, at atmospheric pressure, in the ATOMFLO device (Surfx Technologies LLC prod...
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