Method for generating cold plasma by discharge under high pressure and dielectric barrier discharge device

Abstract

The invention relates to a method for generating cold plasma by gas discharge under high pressure and a dielectric barrier discharge device using the method. In the method, dispersed conducting particles are added to a discharge space where an electric field is applied, the conducting particles cause electric field distortion, corona discharge firstly occurs near the conducting particle surfaces, and a discharge channel approximately develops along the leading direction of a power line. The spatial distribution evenness and density of discharge and generated cold plasma are lead by the distribution of the conducting particles. Dispersed conducting particles are added to the dielectric barrier discharge device, so that the average electric field strength applied by the discharge space is lower than the critical breakdown field strength of gas. Therefore, the discharge and the generated cold plasma are distributed more evenly in space, the voltage required by discharge can be reduced, and the invention can be widely used for various gas phase plasma chemical reactions.

Description

technical field [0001] The invention belongs to the technical field of plasma, and relates to a method and a device for generating cold plasma by gas discharge under high pressure. Background technique [0002] Active particles such as electrons, ions, free radicals, and excited atoms and molecules exist in high-pressure (usually above 0.1 atmosphere) cold plasma. Many chemical reactions that do not occur under normal conditions or can only occur under extremely harsh conditions can easily occur in high-pressure cooled plasmas. High-pressure cooled plasma is widely used in many fields of industry. [0003] Applicable methods for generating cold plasma under high pressure mainly include corona discharge and dielectric barrier discharge. In addition, discharge methods such as radio frequency, microwave, and pulsed corona can also be used. [0004] The initial discharge voltage of corona discharge is low and the electrode gap is large, but the discharge is limited near the ti...

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Problems solved by technology

An excessively large gap will prolong the discharge pulse time, easily cause spark discharge, cause the gas temperature to rise too high, and the discharge energy will be converted into gas heat energy, resulting in waste of electric energy, and the discharge will be concentrated in a small number of channels, resulting in uneven discharge distribution

[0007] In the prior art, except for the pulsed corona method, there is no method and device for generating high-density uniform cold plasma in a large space

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