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Method and device for recycling heat energy in reduction exhaust in polysilicon production process

A heat energy recovery and polysilicon technology, applied in the direction of silicon, waste heat treatment, energy efficiency improvement, etc., can solve the problem that the heat energy of the reduced exhaust gas is not effectively recycled, and achieve the effect of reducing the consumption.

Active Publication Date: 2011-05-25
XINTE ENERGY
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  • Abstract
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Problems solved by technology

[0009] This scheme adopts the method of step-by-step condensation to fully recycle chlorosilane, hydrogen, and hydrogen chloride in the reduction tail gas, but does not effectively recycle the heat energy in the reduction tail gas

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  • Method and device for recycling heat energy in reduction exhaust in polysilicon production process

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Embodiment Construction

[0025] In the technical solution provided by the present invention, the equipment is mainly divided into three parts according to functions:

[0026] 1. The separation and purification part of chlorosilane is mainly composed of a purification tower (T), a bottom reboiler (E2), and a top condenser (E3);

[0027] 2. The chlorosilane condensation and separation part in the reduction tail gas is mainly composed of the tail gas condenser (E1);

[0028] 3. The chlorosilane storage and delivery part is mainly composed of a chlorosilane buffer tank (D) and a chlorosilane delivery pump (P).

[0029] The bottom of the purification tower (T) is provided with a chlorosilane outlet 16, a high boiler outlet 15, and a chlorosilane gas inlet 19, wherein the chlorosilane outlet 16 is connected to the bottom chlorosilane inlet 17 of the bottom reboiler (E2), and the chlorine The silane gas inlet 19 is connected with the chlorosilane gas outlet 18 at the top of the bottom reboiler (E2); the mid...

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Abstract

The invention discloses a method and device for recycling heat energy in reduction exhaust in a polysilicon production process. The method comprises the following steps: reduction exhaust and chlorsilane are subjected to primary heat exchange in a tower bottom reboiler; and after heat exchange, part of the chlorsilane is vaporized and delivered into a chlorsilane purification tower to serve as a heat source for the chlorsilane purification tower, the reduction exhaust subjected to heat exchange is delivered into a condenser, and the chlorsilane in the reduction exhaust is condensed into liquid to be delivered into the chlorsilane purification tower. The device for recycling the heat energy in reduction exhaust in the polysilicon production process comprises a tower top condenser, a purification tower, a tower bottom reboiler, an exhaust condenser, a chlorsilane buffer tank and a chlorsilane delivery pump which are sequentially connected, wherein the outlet of the chlorsilane delivery pump is connected with the purification tower. By means of the technical improvement provided by the invention, the steam consumption of the reduction rectification system can be reduced by 40%, the load of the refrigerator of a CDI (capacitor discharge ignition) system can be reduced by 7% simultaneously, and the circulating water consumption is reduced by about 52.44%, thereby achieving the purposes of favorable energy conservation and consumption reduction.

Description

technical field [0001] The invention relates to a method for recycling heat energy, in particular to a method and a device for recycling heat energy of reduction tail gas in polysilicon production. Background technique [0002] Polycrystalline silicon is an important raw material for the preparation of solar cells, integrated circuits and electronic devices. It is one of the basic raw materials with the largest consumption and the highest purity requirements in the information industry. It is also a product and industry that the country encourages the development of. [0003] From the second half of 2006, driven by the high profits of the solar energy industry, a wave of polysilicon projects was launched in China. However, due to immature self-owned technology and backward imported technology, many projects generally suffer from serious environmental pollution, large material consumption, high production cost, low heat utilization rate and other problems, which have brou...

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C01B33/03F27D17/00
CPCY02P10/25
Inventor 杨连勇银波郭增昌
Owner XINTE ENERGY
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