Coplanarity measuring system based on projection Moire principle

Abstract

The invention discloses a coplanarity measuring system based on a projection Moire principle, which comprises a cold light source (1), a collimation lens (2), a CCD (Charged Coupling Device) camera (3), an LCD panel (4), a projecting lens (5), an optics platform (6), a high-precision mobile station (7) and a computer (8). The LCD panel (4) shows candy strips which are generated by the computer (8), light emitted by the cold light source (1) irradiates on the LCD panel (4) after passing through the collimation lens (2), the candy strips which are showed on the LCD panel (4) are projected on a reference plane or a to-be-measured object surface which is loaded on the high-precision mobile station (7), and the CCD camera (3) is arranged on the side surface of the LCD panel (4). The invention ensures that the uniformity, the measuring area and the measuring accuracy of the whole light field are greatly improved, and can meet the requirement for large-area and high-accuracy real-time rapid measurement required by the current package test.

Description

technical field [0001] The invention belongs to the field of electronic packaging, and in particular relates to a coplanarity measurement system for packaged devices in electronic packaging, which is suitable for large-scale packaging such as BGA (Ball Grid Array, ball grid array packaging) and CSP (Chip Size Package, chip size packaging), etc. The coplanarity of large-scale integrated circuit packages is detected in real time. Background technique [0002] The integrated circuit (IC) industry has become the key to the development of the national economy, and IC design, manufacturing and packaging testing are the three pillars of the IC industry development. In actual production, due to the lack of on-line and off-line evaluation methods, many products fail to discover hidden dangers in the reliability of the products before they are put into the market, and even can only detect their processing quality and reliability through the use process of the device, which seriously h...

AI Technical Summary

Problems solved by technology

The physical scanning process of the laser beam results in very low measurement speeds

Moreover, the traditional detection method is to move the position of the reference grid through mechanical movement to achieve phase shift. The moving speed is slow, and the motion brings vibration, noise and poor repeating phase shift accuracy, which cannot meet the requirements of high-precision real-time measurement.

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