Coplanarity measuring system based on projection Moire principle

A measurement system and coplanarity technology, applied in the direction of measuring devices, instruments, optical devices, etc., can solve problems such as poor vibration, noise and repetitive phase shift accuracy, inability to meet high-precision real-time measurement, and slow moving speed. Achieve good contrast, improve measurement accuracy and measurement speed, and improve measurement accuracy

Active Publication Date: 2011-05-25
HUAZHONG UNIV OF SCI & TECH
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Problems solved by technology

The physical scanning process of the laser beam results in very low measurement speeds
Moreover, the traditional detection method is to move the position of the reference grid through mechanical movement t

Method used

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  • Coplanarity measuring system based on projection Moire principle
  • Coplanarity measuring system based on projection Moire principle
  • Coplanarity measuring system based on projection Moire principle

Examples

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Example Embodiment

[0023] The present invention will be further described below with reference to the accompanying drawings and specific embodiments. The object to be tested in this embodiment is BGA solder balls, but is not limited to BGA solder balls. It can also be substrate flatness in other package forms. .

[0024] The coplanarity measurement system based on the projection Moiré principle of the present invention includes a cold light source 1, a collimator lens 2, a CCD camera 3, an LCD liquid crystal panel 4, a projection lens 5, an optical platform 6, a high-precision mobile platform 7 and a computer 8.

[0025] The collimating lens 2, the LCD panel 4, the projection lens 5, and the high-precision moving table 7 are linearly clamped and fixed on the optical platform 6 along the axial direction. The CCD camera 3 is arranged on the side of the LCD panel 4 to capture A stripe pattern formed on the surface of the object to be measured on the high-precision mobile station 7. The LCD panel 4 is c...

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Abstract

The invention discloses a coplanarity measuring system based on a projection Moire principle, which comprises a cold light source (1), a collimation lens (2), a CCD (Charged Coupling Device) camera (3), an LCD panel (4), a projecting lens (5), an optics platform (6), a high-precision mobile station (7) and a computer (8). The LCD panel (4) shows candy strips which are generated by the computer (8), light emitted by the cold light source (1) irradiates on the LCD panel (4) after passing through the collimation lens (2), the candy strips which are showed on the LCD panel (4) are projected on a reference plane or a to-be-measured object surface which is loaded on the high-precision mobile station (7), and the CCD camera (3) is arranged on the side surface of the LCD panel (4). The invention ensures that the uniformity, the measuring area and the measuring accuracy of the whole light field are greatly improved, and can meet the requirement for large-area and high-accuracy real-time rapid measurement required by the current package test.

Description

technical field [0001] The invention belongs to the field of electronic packaging, and in particular relates to a coplanarity measurement system for packaged devices in electronic packaging, which is suitable for large-scale packaging such as BGA (Ball Grid Array, ball grid array packaging) and CSP (Chip Size Package, chip size packaging), etc. The coplanarity of large-scale integrated circuit packages is detected in real time. Background technique [0002] The integrated circuit (IC) industry has become the key to the development of the national economy, and IC design, manufacturing and packaging testing are the three pillars of the IC industry development. In actual production, due to the lack of on-line and off-line evaluation methods, many products fail to discover hidden dangers in the reliability of the products before they are put into the market, and even can only detect their processing quality and reliability through the use process of the device, which seriously h...

Claims

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Application Information

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IPC IPC(8): G01B11/00G01B11/25
Inventor 朱福龙宋劭张伟刘胜王志勇张鸿海
Owner HUAZHONG UNIV OF SCI & TECH
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