Thin film solar cell and manufacturing method thereof

A solar cell and manufacturing method technology, applied in circuits, photovoltaic power generation, electrical components, etc., can solve the problems of short circuit, thin film solar cell yield, reliability decline, etc., to prevent short circuit and leakage, good light capture effect, power generation The effect of fewer layer defects

Inactive Publication Date: 2011-06-08
MITSUBISHI ELECTRIC CORP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0011] However, the technique of forming a concave-convex structure on the film surface by etching with the above-mentioned acid has the following problems: due to uneven etching, pinholes caused by sharp protrusions are locally formed, resulting in short circuits, etc. Yield and reliability decrease

Method used

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  • Thin film solar cell and manufacturing method thereof
  • Thin film solar cell and manufacturing method thereof
  • Thin film solar cell and manufacturing method thereof

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Experimental program
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Effect test

Embodiment approach 1

[0039] figure 1It is a cross-sectional view showing a schematic structure of the thin-film solar cell 10 according to Embodiment 1 of the present invention. The thin film solar cell 10 includes: a transparent insulating substrate 1, a first transparent conductive film (transparent electrode layer) 2 formed on the transparent insulating substrate 1 and serving as a first electrode layer, a first transparent conductive film (transparent electrode layer) 2 formed on the transparent insulating substrate 1 and the first transparent conductive film 2 The conductive oxide light scatterer 4b on the conductive oxide light scatterer 4b, the first power generation layer 5 formed on the conductive oxide light scatterer 4b, and the back electrode layer 6 formed on the first power generation layer 5 and serving as the second electrode layer.

[0040] In addition, the first power generation layer 5 is composed of at least two or more layers, and in this embodiment includes a P-type amorphous...

Embodiment approach 2

[0069] Figure 5 It is a cross-sectional view showing a schematic structure of a tandem thin-film solar cell 20 according to Embodiment 2 of the present invention. The tandem thin-film solar cell 20 related to the second embodiment is a modified example of the thin-film solar cell 11 of the first embodiment, and includes a transparent insulating substrate 1, a first transparent conductive film (transparent electrode layer) 2, a conductive oxide light-scattering Body 4b, first power generation layer 5, second power generation layer 8, conductive oxide light scatterer 4c, and back electrode layer 6. exist Figure 5 In , for the same components as those of the thin-film solar cells 10 and 11 related to Embodiment 1, the marks and figure 1 as well as image 3 same symbols, and their descriptions are omitted.

[0070] The thin film solar cell 20 differs from the thin film solar cell 11 of Embodiment 1 in that a conductive oxide light scatterer 4 c is formed as a conductive ligh...

Embodiment approach 3

[0094] Figure 8-1 It is a cross-sectional view showing a schematic structure of a thin-film solar cell 30 according to Embodiment 3 of the present invention. The thin-film solar cell 30 related to Embodiment 3 is a modified example of the thin-film solar cell 10 in Embodiment 1. Like the thin-film solar cell 10, it includes: a transparent insulating substrate 1, a first transparent conductive film (transparent electrode layer) 2, a conductive Oxide light scatterer 4 b , first power generation layer 5 , and back electrode layer 6 . exist Figure 8-1 In , for the same components as those of the thin-film solar cell 10 related to Embodiment 1, the marks and figure 1 The same symbols are used and their explanations are omitted.

[0095] The difference between the thin-film solar cell 30 and the thin-film solar cell 10 of Embodiment 1 is that the separated first transparent conductive layer on the surface of the first transparent conductive film (transparent electrode layer) 2 ...

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Abstract

A thin film solar cell having a transparent electrode with minute surface irregularities with low surface roughness and for which an an-plane resistance that is approximately uniform can be obtained by forming on a transparent insulating substrate (1) multiple first transparent conductive films (2) that are separated from each other within the substrate plane, forming a second transparent conductive film on the first transparent conductive film (2), forming first granular bodies (4a) dispersed on the first transparent conductive film (2) by etching the second transparent conductive film into a granule form, forming a power generating layer (5) on the first transparent conductive film (2) and on the dispersed first granular bodies (4a), and forming a back electrode layer (6) on the power generating layer (5).

Description

technical field [0001] The invention relates to a thin-film solar cell and a manufacturing method thereof, in particular to a thin-film solar cell related to light trapping technology and a manufacturing method thereof. Background technique [0002] Currently, as a light-harvesting technology for thin-film solar cells, in the case of thin-film solar cells that allow light to enter from the transparent insulating substrate side, a method of forming a concave-convex structure on the surface of a transparent conductive film formed on a transparent insulating substrate is used. It is generally known that the light-harvesting technology that forms the concave-convex structure improves the light conversion efficiency of thin-film solar cells due to the reduction of light reflectance and the light scattering effect. Specifically, light incident from the transparent insulating substrate side is incident on the photoelectric conversion layer after being scattered at the interface bet...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01L31/04
CPCH01L31/03921H01L31/03762H01L31/02363H01L31/0236H01L31/075H01L31/1884Y02E10/548H01L31/022466H01L31/022483
Inventor 山林弘也时冈秀忠山向干雄
Owner MITSUBISHI ELECTRIC CORP
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