Adjustable nano grating, nano grating accelerometer and processing method of adjustable nano grating or nano grating accelerometer

A nano-grating and accelerometer technology, which is applied in the direction of measuring acceleration, velocity/acceleration/shock measurement, diffraction grating, etc., can solve the problem of not considering the polarization state of the incident wave, and achieve the effect of simple structure and high sensitivity

Inactive Publication Date: 2011-06-15
BEIHANG UNIV +1
View PDF6 Cites 9 Cited by
  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0006] (4) In the vector diffraction theory, the polarization state of the incident wave should be considered when calculating the diffraction efficiency, but the polarization state of the incident wave is not considered in the scalar diffraction theory

Method used

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View more

Image

Smart Image Click on the blue labels to locate them in the text.
Viewing Examples
Smart Image
  • Adjustable nano grating, nano grating accelerometer and processing method of adjustable nano grating or nano grating accelerometer
  • Adjustable nano grating, nano grating accelerometer and processing method of adjustable nano grating or nano grating accelerometer
  • Adjustable nano grating, nano grating accelerometer and processing method of adjustable nano grating or nano grating accelerometer

Examples

Experimental program
Comparison scheme
Effect test

specific Embodiment approach

[0026] The preferred embodiment of the adjustable nano-grating of the present invention is:

[0027] It includes a movable sub-grating and a fixed sub-grating, and the movable sub-grating and the fixed sub-grating respectively include a plurality of single gratings;

[0028] A plurality of single gratings of the movable sub-grating are evenly spaced along the horizontal axis and fixed on the beam;

[0029] The plurality of single gratings of the fixed sub-gratings are evenly spaced along the horizontal axis and fixed on the base;

[0030] The multiple single gratings of the movable sub-grating and the fixed sub-grating are arranged vertically and intersectingly to form a plurality of slits;

[0031] The beam is a movable beam, and the movable beam is connected with a quality block.

[0032] Nano grating accelerometer of the present invention, its preferred embodiment is:

[0033] It includes a laser light source, an accelerometer chip, and a photoelectric detection device, ...

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to view more

PUM

No PUM Login to view more

Abstract

The invention discloses an adjustable nano grating, a nano grating accelerometer and a processing method of the adjustable nano grating or the nano grating accelerometer. The adjustable nano grating comprises a movable sub-grating and a fixed sub-grating, and is processed by adopting a focused ion beam / scanning electron microscope double-beam system, the accuracy is high and the period consistency is good. The movable sub-grating and a plurality of single gratings of the fixed sub-grating are arranged in an upper-lower cross manner, and a beam is connected with mass blocks. The nano grating accelerometer comprises laser light sources, an accelerometer chip and a photoelectric detector; and the accelerometer chip comprises an adjustable nano grating. The adjustable nano grating is used as a central element of a sensing part, and jointly form a sensing head together with the mass blocks and the beam; and the light sources irradiate the adjustable nano grating, the photoelectric detector and a detection circuit are utilized for carrying out signal acceleration detection, and when the acceleration is calculated, the vector diffraction theory is used as a basis. In the invention, the structure is simple and the sensitivity is high.

Description

technical field [0001] The invention relates to an accelerometer device, in particular to an adjustable nanometer grating, a nanometer grating accelerometer and a processing method thereof. Background technique [0002] Nano grating accelerometer is a device used to measure acceleration and acceleration changes. Nano grating accelerometer is based on grating vector diffraction theory and nano processing technology. The scalar theory is relatively successful when the structural size (period, slit depth, etc.) of the grating is much larger than the wavelength of the incident light. However, for sub-wavelength gratings (the size of the grating is close to or smaller than the wavelength of the incident light), its structural size is in the order of wavelength or sub-wavelength. At this time, the assumption of scalar diffraction theory is no longer valid, and strict vector Diffraction theory to analyze and design. The basis of vector diffraction theory is strict electromagneti...

Claims

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to view more

Application Information

Patent Timeline
no application Login to view more
IPC IPC(8): G01P15/093G02B5/18
Inventor 冯丽爽周震姚保寅刘惠兰迟媛媛
Owner BEIHANG UNIV
Who we serve
  • R&D Engineer
  • R&D Manager
  • IP Professional
Why Eureka
  • Industry Leading Data Capabilities
  • Powerful AI technology
  • Patent DNA Extraction
Social media
Try Eureka
PatSnap group products

Browse by: Latest US Patents, China's latest patents, Technical Efficacy Thesaurus, Application Domain, Technology Topic.

© 2024 PatSnap. All rights reserved.Legal|Privacy policy|Modern Slavery Act Transparency Statement|Sitemap