Micro lens and optical waveguide power divider integrated component and manufacturing method thereof

A technology of integrated components and manufacturing methods, applied in the field of micro-optical components

Inactive Publication Date: 2011-07-06
SOUTHWEAT UNIV OF SCI & TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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However, the fabrication technology of integrating multiple micro-optica

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  • Micro lens and optical waveguide power divider integrated component and manufacturing method thereof
  • Micro lens and optical waveguide power divider integrated component and manufacturing method thereof
  • Micro lens and optical waveguide power divider integrated component and manufacturing method thereof

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[0027] In order to enable those skilled in the art to better understand the technical solution of the present invention, and to make the above-mentioned purpose, features and advantages of the present invention more obvious and understandable, the present invention will be further described in detail below in conjunction with the embodiments and accompanying drawings .

[0028] figure 1 In the embodiment of the present invention, it is used to manufacture the femtosecond laser control system of the microlens and optical waveguide power divider integrated component of the present invention. Among them, the pump laser 101 and the Ti:Sapphire femtosecond resonator 102 are used to generate femtosecond laser pulses; the generated femtosecond laser has an output wavelength of 800nm, a pulse width of 50fs, a repetition rate of 10Hz, and a single pulse energy of 30mJ. The femtosecond laser passes through the filter set 103 and enters the attenuation plate set 104 for energy attenuati...

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Abstract

The invention provides a micro lens and optical waveguide power divider integrated component and a manufacturing method thereof. In the invention, a hemispherical focusing micro lens array is formed on a glass substrate by the application of an ion exchange technology and further femtosecond laser is utilized to induce to change the refractive index inside the glass substrate to form the optical waveguide power divider with the micrometer width so as to realize integration of two basic micro optical components, namely a micro lens and the optical waveguide power divider, onto one glass substrate, realize alignment and coupling of the micro lens and the optical waveguide, generate a micro optical integrated device with the optical performance and fill a technical gap of the field.

Description

technical field [0001] The invention belongs to the technical field of micro-optical components, and more specifically relates to an integrated component of a micro-lens and an optical waveguide power divider and a manufacturing method thereof. Background technique [0002] Micro-optical components are the key components of micro-optical electromechanical systems (MOEMS), among which micro-lens arrays, gratings, optical waveguides, etc. are the most basic components of micro-optical components. Micro-optical components have the advantages of small size, light weight, flexible design, arrayable and easy to replicate, etc., which can improve the transmission efficiency of the optical system, reduce the weight of the system, change the energy distribution and phase change of the input light, realize beam transformation and The role of optical interconnection is widely used in various fields such as integrated optics, optical communication, laser optics, and holographic technolo...

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Application Information

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IPC IPC(8): G02B6/122G02B6/125G02B6/13
Inventor 周自刚邱荣唐金龙李晓红
Owner SOUTHWEAT UNIV OF SCI & TECH
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