Miniaturized on-chip antenna capable of resisting harmonic waves
An on-chip antenna and harmonic technology, applied in the direction of resonant antenna, slot antenna, mid-position feed between antenna endpoints, etc., to achieve the advantages of low price, solve the problem of process technology compatibility, and high integration effect
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[0022] The embodiments of the present invention are described in detail below. This embodiment is implemented on the premise of the technical solution of the present invention, and detailed implementation methods and specific operating procedures are provided, but the protection scope of the present invention is not limited to the following implementation example.
[0023] like figure 1 As shown, the chip silicon substrate 1 in this embodiment has a thickness of 300 μm and a resistivity of 10Ω·cm˜30Ω·cm. A silicon dioxide layer 2 with a thickness of 6 μm is grown on the silicon substrate for insulation; a metal top layer structure 3 for preparing an antenna is grown on the silicon dioxide layer.
[0024] The metal top layer structure 3 is the preparation layer of the on-chip antenna, and the thickness of the metal layer is 0.9 μm. On the metal layer, a suppressible third harmonic structure including an electromagnetic bandgap structure with wide stop band and miniaturization ...
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