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Energy-saving furnace body of polycrystalline silicon reduction furnace

A reduction furnace, polysilicon technology, applied in silicon compounds, sustainable manufacturing/processing, inorganic chemistry, etc., can solve the problems of difficult polishing of the inner wall of the furnace, poor polishing effect, etc., to achieve safe production, good mirror effect, improve The effect of the energy saving effect

Inactive Publication Date: 2011-08-10
TIANJIN UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] The technical problem to be solved by the present invention is to provide a temperature control technology for the inner wall of the polysilicon reduction furnace to save energy, and at the same time, it can overcome the above-mentioned deficiencies of the difficulty in polishing the inner wall of the furnace and the poor polishing effect, and avoid the direct deposition of amorphous silicon on the furnace body On the wall, the thickness of the furnace body is reduced by directly polishing the inner wall of the furnace, which improves the safety of the reduction furnace operation and reduces the energy consumption of the reduction furnace

Method used

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  • Energy-saving furnace body of polycrystalline silicon reduction furnace
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  • Energy-saving furnace body of polycrystalline silicon reduction furnace

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Embodiment approach 1

[0017] Implementation mode 1: if figure 1 , 2 As shown, the polysilicon reduction furnace body includes: 1-furnace body insulation cylinder, 2-stainless steel bolts, 3-furnace body wall, 4-furnace body wall, 5-new inner wall, 6-insulation layer, 7-bolts hole. Wherein, newly-increased inner wall 5 selects the stainless steel sheet that thickness is 0.2mm for use, and its overall shape is identical with furnace body, can be divided into rectangle ( image 3 ), the area of ​​each rectangular stainless steel sheet is 0.1 square meters (2m high, 0.05m wide), and 8 bolt holes are opened on the sheet, and the hole size is 10mm, which is mainly used for fixing needs and heat transfer control Need, the stainless steel sheet is polished by the machine tool, the polishing process is convenient and the polishing effect is good, and the polished mirror surface roughness can achieve Ra0.008μm. The stainless steel bolt 2 used is M8 in type and has a length of 60mm. By adjusting the positi...

Embodiment approach 2

[0018] Implementation mode 2: if image 3 As shown, the polysilicon reduction furnace body includes: 1-furnace body insulation cylinder, 2-stainless steel bolts, 3-furnace body wall, 4-furnace body wall, 5-new inner wall, 6-insulation layer, 7-bolts hole. Wherein, newly added inner wall 5 selects the stainless steel sheet that thickness is 2mm for use, and its overall shape is identical with body of furnace, can be divided into rectangle during preparation, and the area of ​​every rectangular stainless steel sheet is 2 square meters (height is 2m, and width is 1m), There are 8 bolt holes on the sheet, and the size of the hole is 12mm, which is mainly used for the needs of fixing and heat transfer control. The stainless steel sheet is polished by the machine tool. The polishing process is convenient and the polishing effect is good. The polished mirror surface The roughness can achieve Ra0.008μm. The stainless steel bolt 2 used is M10, the length is 60mm, and the thickness of...

Embodiment approach 3

[0019] Implementation mode 3: if image 3 As shown, the polysilicon reduction furnace body includes: 1-furnace body insulation cylinder, 2-stainless steel bolts, 3-furnace body wall, 4-furnace body wall, 5-new inner wall, 6-insulation layer, 7-bolts hole. Wherein, newly-increased inner wall 5 selects the stainless steel sheet that thickness is 1mm for use, and its overall shape is identical with furnace body, can be divided into rectangle ( image 3 ), the area of ​​each rectangular stainless steel sheet is 1 square meter (height is 2m, width 0.5m), bolt holes 8 are opened on the sheet, and the size of the hole is 12mm, which is mainly used for fixing needs and heat transfer control Need, the stainless steel sheet is polished by the machine tool, the polishing process is convenient and the polishing effect is good, and the polished mirror surface roughness can achieve Ra0.008μm. The stainless steel bolt 2 used is M10, the length is 60mm, and the thickness of the heat insulat...

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Abstract

The invention discloses an energy-saving furnace body of a polycrystalline silicon reduction furnace and a method for controlling the inner wall temperature of the furnace body. The furnace body comprises a furnace body heat insulating barrel, a stainless steel bolt, a furnace body outer wall surface, a furnace body inner wall surface, a newly-added inner wall and a newly-added heat insulating layer, wherein the stainless steel bolt is fixed on the furnace body inner wall surface in a welding way; and the newly-added inner wall is fixed on the stainless steel bolt. Compared with the conventional reduction furnace, the reduction furnace has the advantage that: a heat insulating layer is additionally arranged in the reduction furnace. By adopting the invention, the problem of energy waste caused by difficulty in polishing of the conventional furnace body inner wall and a poor polishing effect is solved, and the thermal radiation loss of the reduction furnace is reduced. The energy-saving furnace body has a simple structure and a good energy-saving effect, and is convenient to operate.

Description

technical field [0001] The invention relates to an energy-saving technology for a polysilicon reduction furnace, in particular to a furnace inner wall temperature control technology for realizing energy-saving of a polysilicon reduction furnace. Background technique [0002] At present, polysilicon production enterprises at home and abroad mainly adopt the "improved Siemens method". The production process of this method is to use chlorine and hydrogen to synthesize hydrogen chloride (or purchased hydrogen chloride), hydrogen chloride and silicon powder to synthesize trichlorosilane at a certain temperature, and then separate and rectify trichlorosilane to purify the purified high-purity After trichlorosilane and hydrogen are mixed in proportion, they are passed into the polysilicon reduction furnace at a certain temperature and pressure, and the deposition reaction is carried out on the energized high-temperature silicon core to form polysilicon. Polysilicon products, while...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C01B33/035
CPCY02P20/10
Inventor 刘春江黄哲庆段长春袁希钢
Owner TIANJIN UNIV
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