Movable false tooth type flexible microelectrode applicable to facial paralysis rehabilitation
A micro-electrode and denture technology, applied in the field of medical equipment, can solve the problems of facial paralysis rehabilitation, limited practical significance, limited practical significance of rehabilitation treatment, etc., and achieve the effect of easy wearing, simple structure and functional recovery
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[0028] The specific preparation process of this example is as follows: first deposit a 3 μm-5 μm polychlorinated p-xylylene (Parylene-C) film on the Si wafer, and then throw 0.01 mm-1 mm polydimethylsiloxane (PDMS), 80 ℃ drying for 4 hours to form a structural layer. Then throw 5μm positive resist and pattern it, sputter noble metal (including Pt, Ir, Au, etc.) seed layer, 100-15000 Angstroms, use Lift-off process to remove photoresist, pattern the seed layer, and form the electrode circuit layer. Then, throw 0.01mm-1mm PDMS, dry at 80°C for 4 hours, then deposit 3μm-5μm Parylene-C, pattern the photoresist for the second time, use reactive ion etching (RIE) to remove Parylene-C Cut through to expose the electrode points to form the covering layer.
[0029] Such as Figure 1-Figure 3 As shown, the removable denture-type flexible microelectrode for facial paralysis prepared in this example includes: a structural layer 1, an electrode circuit layer 2 and a covering layer 3 that...
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