Differential capacitor type micro-vibration sensor

Abstract

The invention relates to a differential capacitor type micro-vibration sensor. The sensor comprises two sensitive capacitors, wherein the sensitive capacitors comprise a metal capacitor movable pole plate, upper and lower capacitor fixed pole plates and two metal gaskets and change differentially along with the vibration of a base; a sensitive mass block is directly formed by the outer ring region of the metal capacitor movable pole plate without adding another sensitive mass block and connected with a fixed region firmly fixed on an installation stand column through more than three arc elastic cantilevers uniformly distributed along circumference; damping holes are uniformly distributed along the circumferential direction of a median diameter of the sensitive mass block; substrates of the capacitor fixed pole plates are made of ceramic materials; conductive metal films are coated in the outer ring region and the inner ring region which are insulated with each other; the metal film ofthe outer ring region is used for forming fixed electrodes of the sensitive capacitors, and a lead wire is directly welded from the side surface of the metal film; and the metal film of the inner ring region is used for conducting the movable electrode plate and a ground. The sensor has the advantages of high sensitivity, favorable frequency characteristic and strong overload resistant and impactresistant capabilities and simple structure.

Description

technical field [0001] The invention relates to a differential-capacity micro-vibration sensor, which belongs to the field of inertial measurement. Background technique [0002] Vibration sensors have always played an important role in inertial navigation, earth observation, deep space exploration, and precise guidance of high-tech weapons. Sensors are in urgent need. [0003] Capacitive vibration sensors have received special attention in recent years because of their characteristics in measurement accuracy, temperature characteristics, low power consumption, wide dynamic response range and simple structure, especially in the field of μg-level high-precision micro-vibration applications, and have been widely used. . The sensitive signal of the capacitive sensor is capacitance. The principle is generally that a parallel plate capacitor is formed between the sensitive mass and the substrate. When the measured substrate vibrates, the sensitive mass and the sensor housing wil...

AI Technical Summary

Problems solved by technology

However, due to the limitations of the MEMS technology level, there is still a certain gap in the noise level and impact resistance of the MEMS micro-mechanical capacitive accelerometer, and it is difficult to apply it in the field of military micro-vibration measurement that requires high precision and reliability.

Images