Multi-channel filter array micro electro mechanical system (MEMS) spectrum type gas sensitive sensor

Abstract

The invention discloses a multi-channel filter array micro electro mechanical system (MEMS) spectrum type gas sensitive sensor. Category and concentration of a measured gas are determined by analyzing the infrared transmission spectrum of the gas to be measured. The sensor consists of a light source (1) manufactured on a silicon substrate, a gas chamber (2), a one-dimensional photonic crystal filter array (3) and an infrared light intensity detection array (4), wherein infrared light emitted by the light source (1) enters the gas chamber (2); after the infrared light is interacted with the gas to be measured, the infrared light is emitted through different filter channels of the one-dimensional photonic crystal filter array (3); light intensity signals emitted from the filter channels areconverted into electrical signals on the corresponding different detection units of the infrared light intensity detection array (4) respectively and output, and the intensity of the signals output by the detection units at different positions reflects the absorption condition of the gas to be measured on the infrared light of different wavelengths; and the components of the gas can be judged andthe concentration of the gas can be determined by measuring the transmission spectrum of the gas to be measured and comparing the transmission spectrum with the characteristics of a pre-stored map and by means of a chemometrics algorithm.

Description

technical field [0001] The invention relates to the technical field of gas sensors, in particular to a multi-channel filter array MEMS spectroscopic gas sensor. . It effectively solves the problems of low selectivity and poor anti-interference of the existing gas sensor, and its fabrication is compatible with the standard CMOS process, which is convenient for on-chip integration. Background technique [0002] With the continuous progress of society, the application of gas sensors in pharmaceutical, medical testing, food industry, petrochemical, customs, coal mine and other fields is becoming more and more important. The traditional gas sensors are large in size, high in power consumption, low in sensitivity and inconvenient to use, and are difficult to popularize; The types of gases that can be detected are affected by the properties of the sensitive membrane material. For some newly discovered substances, it is difficult to find highly specific functional materials. [...

AI Technical Summary

Problems solved by technology

[0005] In order to solve the problems of low sensitivity, poor selectivity, complex processing and high cost of existing gas sensors, the present invention provides a multi-channel filter array MEMS gas sensor to meet people's requirements for convenient, fast and accurate detection of gas environments

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