Nano-particle composite phase change material and preparation method thereof

Abstract

The invention discloses a nano-particle composite phase change material and a preparation method thereof. The material sequentially comprises a substrate layer, a second phase layer, a phase change layer and a protection layer from bottom to top, wherein the substrate layer is a Si sheet or K9 glass sheet with thickness of 3.0 mm; the second phase layer is a Si or Ge or SbTe or Sb film with thickness of 10-100 nm; the phase change layer is a GeSbTe or AgInSbTe phase change material film with thickness of 10-100 nm; the protection layer is a SiN or ZnS-SiO2 film with thickness of 10-20 nm; and the second phase layer and the phase change layer are formed into a composite phase change layer under the effect of laser irradiation. The material disclosed by the invention has relatively high crystallization speed.

Description

technical field [0001] The invention relates to a phase change material, which is a kind of nano particle composite phase change material capable of increasing the crystallization speed of the phase change material and a preparation method thereof. It can be used for phase change information storage to increase data erasing (crystallization) speed. It can also be used in the fields of near-field optics, optical switches, optical waveguides, and optical sensing. Background technique [0002] Phase-change materials have been widely used in erasable and rewritable optical discs, and they also show good application prospects in the next-generation semiconductor phase-change memory, and it is expected to form a universal memory (Unified Memory) based on it. With the improvement of storage density and capacity and the expansion of functions (such as applied to dynamic random access memory), the focus of attention will shift from density to speed. At the same time of ultra-high de...

AI Technical Summary

Problems solved by technology

In the past, the prepared second phase material was directly compounded into the matrix material through mechanical, thermal diffusion or sol-gel chemical methods, and the formation area of ​​the material was often uncontrollable.

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