Nano-particle composite phase change material and preparation method thereof

A composite phase change material and nanoparticle technology, applied in the field of nanoparticle composite phase change material and its preparation, can solve the problem of uncontrollable material formation area, and achieve the effect of simple preparation and performance control method and good controllability

Inactive Publication Date: 2011-11-16
SHANGHAI INST OF OPTICS & FINE MECHANICS CHINESE ACAD OF SCI
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

In the past, the prepared second phase material was directly compounded into the matrix material through mechanical

Method used

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  • Nano-particle composite phase change material and preparation method thereof
  • Nano-particle composite phase change material and preparation method thereof
  • Nano-particle composite phase change material and preparation method thereof

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0022] The preparation method of the nanoparticle composite phase change material comprises the following steps:

[0023] ① Using vacuum magnetron sputtering equipment, the vacuum degree is 1.0×10 -4 Under the condition of Pa, on the Si substrate layer 4 of cleaning, sputtering described Sb second phase layer 3 (thickness 40nm), Ge 2 Sb 2 Te 5 Thin films of phase change layer 2 (film thickness 40nm) and SiN protective layer 1 (film thickness 10nm);

[0024] ②Using a nanosecond pulse laser with a wavelength of 488nm, a pulse width of 250ns, and a power of 12mW, it is focused on the film by an objective lens with a numerical aperture of 0.9, and the laser irradiation area is melted-solidified. The particles are dispersed in the material of the phase change layer to form a composite phase change layer, and the preparation of the nanoparticle composite phase change material is completed.

[0025] The parameters of other examples 2 to 17 are shown in the table below, and the pr...

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Abstract

The invention discloses a nano-particle composite phase change material and a preparation method thereof. The material sequentially comprises a substrate layer, a second phase layer, a phase change layer and a protection layer from bottom to top, wherein the substrate layer is a Si sheet or K9 glass sheet with thickness of 3.0 mm; the second phase layer is a Si or Ge or SbTe or Sb film with thickness of 10-100 nm; the phase change layer is a GeSbTe or AgInSbTe phase change material film with thickness of 10-100 nm; the protection layer is a SiN or ZnS-SiO2 film with thickness of 10-20 nm; and the second phase layer and the phase change layer are formed into a composite phase change layer under the effect of laser irradiation. The material disclosed by the invention has relatively high crystallization speed.

Description

technical field [0001] The invention relates to a phase change material, which is a kind of nano particle composite phase change material capable of increasing the crystallization speed of the phase change material and a preparation method thereof. It can be used for phase change information storage to increase data erasing (crystallization) speed. It can also be used in the fields of near-field optics, optical switches, optical waveguides, and optical sensing. Background technique [0002] Phase-change materials have been widely used in erasable and rewritable optical discs, and they also show good application prospects in the next-generation semiconductor phase-change memory, and it is expected to form a universal memory (Unified Memory) based on it. With the improvement of storage density and capacity and the expansion of functions (such as applied to dynamic random access memory), the focus of attention will shift from density to speed. At the same time of ultra-high de...

Claims

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Application Information

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IPC IPC(8): B32B9/04C09K5/06
Inventor 张科王阳黄欢吴谊群
Owner SHANGHAI INST OF OPTICS & FINE MECHANICS CHINESE ACAD OF SCI
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