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106results about How to "Fast phase change" patented technology

Multilayer nanometer composite phase-transition thin film material and preparation method and application thereof

The invention discloses a multilayer nanometer composite phase-transition thin film material and a preparation method and application thereof. The material is formed by arranging Sn2Se3 film layers and Sb film layers alternatively, one Sn2Se3 film layer and one Sb film layer serve as an alternative period, and the Sn2Se3 layer in the latter alternative period is deposited on the Sb layer in the former alternative period. A general formula of the film structure of the film material is [Sn2Se3(a)/Sb(b)]x, a represents the thickness of the single Sn2Se3 film layer, b represents the thickness of the single Sb film layer, a is greater than or equivalent to 1nm and lower than or equivalent to 50nm, b is greater than or equivalent to 1nm and lower than or equivalent to 50nm, x represents the number of alternative periods or layers of the Sn2Se3 film layers and Sb film layers, and x is a positive integer. The phase-transition thin film material uses Sb as a crystallization induction layer to accelerate phase transition of the phase-transition material, and advantages of low melting point and high thermal stability of Sn2Se3 are used; and the clamping effect of multiple interfaces in the multilayer nanometer composite structure is used to reduce the size of crystal grains, and further to shorten the crystallization time, inhibit crystallization, improve the thermal stability and accelerate phase transition.
Owner:昆山模之特电子材料有限公司

Phase change material, phase change storage unit and preparation method thereof

The invention provides a phase change material, a phase change storage unit and a preparation method thereof, wherein the phase change material comprises a tantalum element, an antimony element and atellurium element, wherein the chemical formula of the phase change material is TaxSbyTez, wherein x, y and z refer to atomic percentages of elements, wherein x is greater than or equal to 1 and lessthan or equal to 25, y is greater than or equal to 0.5, z is less than or equal to 3, and x+y+z is equal to 100. The TaxSbyTez phase change film material disclosed by the invention has the characteristics of being high in phase change speed, outstanding in heat stability, high in data retention capability, long in cycle life, high in rate of finished products and the like, wherein Ta5.7Sb37.7Te56.6 has 10 years of data retention at 165 DEG C, and when being applied to a phase change storage device unit, the operation speed of 6ns and the erase number of one million or above can be achieved; meanwhile, the TaxSbyTez phase change material has very small crystal particles, and the sizes of the crystal particles is still smaller than 30 nm after annealing treatment at 400 DEG C for 30min, which is very important for stability, low power consumption and finished product rate of the device. The preparation method of the phase change memory unit is compatible with a CMOS process and is convenient for accurately controlling the components of the phase change material.
Owner:SHANGHAI INST OF MICROSYSTEM & INFORMATION TECH CHINESE ACAD OF SCI

Multi-layer nanometer composite thin film material for high-speed high-density phase transition storage and method for preparing material

InactiveCN103378289AImprove storage densityIncrease the speed of read and write operationsMaterial nanotechnologyElectrical apparatusHigh densityComposite film
The invention discloses a multi-layer nanometer composite thin film material for a high-speed high-density phase transition storage. The multi-layer nanometer composite thin film material is a SbSe/Ga30Sb70 multi-layer composite thin film, and the structure of the multi-layer nanometer composite thin film material conforms to the following general formula: [SbSe (a) /Ga30Sb70 (b)]x, and is capable of being abbreviated to be [SS(a)/GS(b)]x. In the formula, the a and the b represent the thickness of a single-layer SbSe thin film and the thickness of a single-layer Ga30Sb70 thin film respectively, wherein the a conforms to the following formula: 1<=a<=50nm, the b conforms to the following formula: 1<=b<=50nm, the x represents the number of alternating cycles of the single-layer SbSe thin film and the single-layer Ga30Sb70 thin film or the number of alternating layers of the single-layer SbSe thin film and the single-layer Ga30Sb70 thin film, and the x is equal to 1 or 2 or 3 or 4. The SbSe/Ga30Sb70 multi-layer composite phase transition thin film is formed in a composite mode at the nanometer level, has a high resistance state, a middle resistance state and a low resistance state, is capable of achieving multi-stage storage, and greatly improves the storage density and the reading and writing operation speed of the storage.
Owner:TONGJI UNIV

Er-Se-Sb nanometer phase change film material and preparation method and application thereof

The invention belongs to the technical field of nanomaterials, and relates to an Er-Se-Sb nanometer phase change film material and a preparation method and an application thereof. The film material consists of the three elements of erbium, selenium and antimony, and a general chemical formula of the film material is shown as Er<x>(Se<y>Sb<100-y>)<1-x>, wherein x is greater than 0 and smaller than or equal to 0.05, and y is greater than to 0 and smaller than or equal to 50. The nanometer phase change material can realize a reversible phase change process, has a relatively large difference value between high resistance and low resistance before and after phase change, is easy for implementing '0' and '1' needing to be distinguished during storage, and is an ideal phase change storage material. The preparation method is mature, and easily compatible with an existing semiconductor technology. The nanometer phase change material inherits the advantage of high phase change speed of an antimony-rich phase, has a relatively high crystallization temperature and a data holding capability at the same time, has relatively high crystal-state and non-crystal-state resistance, and facilitates lowering of the power consumption of a phase change storage device.
Owner:JIANGSU UNIV OF TECH

Ge-Sb-Te Ge-enriched N-doped phase-change material for phase-change memory and preparation method thereof

ActiveCN102347446AIncreased crystalline resistivityLarge change in resistanceElectrical apparatusPhase-change memoryExternal energy
The invention relates to a Ge-Sb-Te Ge-enriched N-doped phase-change material for a phase-change memory. The Ge-Sb-Te Ge-enriched N-doped phase-change material for the phase-change memory, provided by the invention, comprises chemical components which accord with a chemical formula as follows: Nx[(Ge1+yTe)a(Sb2Te3)b]100-x, wherein y is more than 0 but not more than 3, x is more than 0 but not more than 35, a is equal to 1 or 2 and b is equal to 1 or 2. The phase-change material is a storage material which has a reversible phase change under the effects of external energy. When a magnetic control sputtering is adopted, atom percentage contents of all the components are adjusted through controlling a power supply power of each target material and each target position and the N2/Ar2 flow ratio so that phase-change storage materials with different crystallization temperatures, smelting points and crystallization activation energies are obtained. Compared with the traditional Ge2Sb2Te5 thin-film material, the Ge-enriched N-doped phase-change material provided by the invention has the advantages of higher crystallization temperature, better data keeping capability, better heat stability, lower power consumption and the like.
Owner:SHANGHAI INST OF MICROSYSTEM & INFORMATION TECH CHINESE ACAD OF SCI

C-doped Sc-Sb-Te phase change memory material, phase change memory cell, and method for fabricating same

The invention provides a C-doped Sc-Sb-Te phase change memory material, a phase change memory cell, and a method for fabricating the same. The Sc-Sb-Te phase change memory material is a Sc-Sb-Te phasechange memory material. In the doped Sc-Sb-Te phase change memory material, the atomic percentage of C is 1% to 40%. The Sc-Sb-Te3 is doped with C, and since C is a low-thermal-conductivity material,thermal diffusion can be well avoided. Further, the good conductivity of C ensures good conduction of the material. Under the effect of external energy, the C-doped Sc-Sb-Te3 phase change memory material can reversibly switch between a high-resistance state and a low-resistance state, and a resistance ratio of the high-resistance state to the low-resistance state can reach two orders of magnitude. When used as the storage medium of a phase change memory, the phase change memory cell not only has the advantages of fast phase change speed and low write operation current, but also is greatly improved in the high-temperature data retention and the reliability. The phase change memory using the phase change memory cell structure of the invention has superiorities of high speed, low power consumption, and good data retention.
Owner:SHANGHAI INST OF MICROSYSTEM & INFORMATION TECH CHINESE ACAD OF SCI

Photoetching method and system using metal glass as photoresist

The invention discloses a photoetching method using a metal glass as a photoresist. The method specifically comprises the following steps: depositing a metal glass material photoresist layer on the surface of a substrate; exposing a sample obtained through depositing according to a target nanometer pattern; generating a nanometer crystallized graphic at an exposed part when the exposed part reaching the crystallization temperature is changed in phase; and etching the exposed sample with the nanometer crystallized graphic so as to form a desired nanometer pattern. According to the invention, as the metal glass material replaces an organic photoresist, the photoetching line width of the obtained sample can be far smaller than the diffraction limit of a laser focusing spot; and moreover, low cost and large etching selection ratio are obtained. The invention further discloses a system for realizing the method; and the system mainly comprises a computer, an arbitrary waveform generator, a semiconductor laser, a collimating beam expander, a beam isolator, a beam splitter, a focusing servo mechanism, a focusing lens, an X-Y-Theta three-dimensional displacement platform and a focusing servo control box. The system disclosed by the invention has the advantages of simple composition, high performance cost, simplicity in operation, comparatively low requirement on operation environment and high output rate.
Owner:HUAZHONG UNIV OF SCI & TECH

Ge-Sb-Te Ge-enriched N-doped phase-change material for phase-change memory and preparation method thereof

The invention relates to a Ge-Sb-Te Ge-enriched N-doped phase-change material for a phase-change memory. The Ge-Sb-Te Ge-enriched N-doped phase-change material for the phase-change memory, provided by the invention, comprises chemical components which accord with a chemical formula as follows: Nx[(Ge1+yTe)a(Sb2Te3)b]100-x, wherein y is more than 0 but not more than 3, x is more than 0 but not more than 35, a is equal to 1 or 2 and b is equal to 1 or 2. The phase-change material is a storage material which has a reversible phase change under the effects of external energy. When a magnetic control sputtering is adopted, atom percentage contents of all the components are adjusted through controlling a power supply power of each target material and each target position and the N2 / Ar2 flow ratio so that phase-change storage materials with different crystallization temperatures, smelting points and crystallization activation energies are obtained. Compared with the traditional Ge2Sb2Te5 thin-film material, the Ge-enriched N-doped phase-change material provided by the invention has the advantages of higher crystallization temperature, better data keeping capability, better heat stability, lower power consumption and the like.
Owner:SHANGHAI INST OF MICROSYSTEM & INFORMATION TECH CHINESE ACAD OF SCI

Si-Sb-Te based sulfur group compound phase-change material for phase change memory

The invention provides a Si-Sb-Te based sulfur group compound phase-change material for a phase change memory, belonging to the technical field of micro-electronics. The phase-change material has high heat stability and high crystallization velocity, and the component general formula is (SiaSbbTec)1-yMy, wherein a nitrogen element or an oxygen element or the mixture of the nitrogen element and the oxygen element; in SiaSbbTec, the content a of Si is 10-25% by atom, and the atom percent ratio of the content between Sb and Te is 1.7<=(b / c)<=2.0; and the content of the doped element M is 0-25% by atom. Under the electrical pulse effect, the material can be converted reversibly between the non-crystalline state (high impedance state) and the crystalline state (low impedance state), thus the information storage is realized; compared with the traditional Ge2Sb2Te5, the material has the advantages of high crystallization temperature, higher heat stability and better crystalline state resistivity; and with the phase-change material provided by the invention as the information memory medium, data retention capability of the memory can be effectively increased, rapid operation velocity can be maintained, the write operation power consumption can be lowered, and the reliability of the memory is improved.
Owner:SHANGHAI INST OF MICROSYSTEM & INFORMATION TECH CHINESE ACAD OF SCI
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