Multilayer nanometer composite phase-transition thin film material and preparation method and application thereof
A nano-composite and thin-film material technology, applied in the field of microelectronic materials, can solve the problems of inability to meet information storage requirements, poor thermal stability of amorphous state, unfavorable storage density, etc., achieve excellent comprehensive phase change performance, and reduce heat loss , the effect of reducing the overall thermal conductivity
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[0037] Examples 1-6 are respectively according to Sn 2 Se 3 / Sb multilayer nanocomposite phase change film with general structural formula [Sn 2 Se 3 (a) / Sb(b)] x Corresponding preparation [Sn 2 Se 3 (5nm) / Sb(1nm)] 8 , [Sn 2 Se 3 (5nm) / Sb(3nm)] 6 , [Sn 2 Se 3 (5nm) / Sb(4nm)] 6 , [Sn 2 Se 3 (5nm) / Sb(5nm)] 5 , [Sn 2 Se 3 (5nm) / Sb(6nm)] 5 , [Sn 2 Se 3 (5nm) / Sb(7nm)] 4 Six materials.
[0038] Above-mentioned six kinds of materials all make according to following preparation steps:
[0039] S1, cleaning SiO2 2 / Si(100) substrate, clean the surface and back, remove dust particles, organic and inorganic impurities, the specific cleaning steps are:
[0040] S10, wash with strong ultrasonic in acetone solution for 3-5 minutes, rinse with deionized water;
[0041] S11. Strong ultrasonic cleaning in ethanol solution for 3 to 5 minutes, rinse with deionized water, and use high-purity N 2 Blow dry the surface and back;
[0042] S12. Dry the water vapor in an oven a...
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