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Preparation method of boron phosphide wear-resistant corrosion-resistant coating

A technology of boron phosphide and corrosion resistance, which is applied in the field of wear-resistant and corrosion-resistant coatings, can solve the problems of short life and achieve the effects of long wear life, low wear rate and low adhesion

Inactive Publication Date: 2013-02-20
HARBIN INST OF TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0003] The present invention solves the technical problem of short service life in the existing boron phosphide film preparation method; and provides a preparation method of boron phosphide wear-resistant and corrosion-resistant coating

Method used

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  • Preparation method of boron phosphide wear-resistant corrosion-resistant coating
  • Preparation method of boron phosphide wear-resistant corrosion-resistant coating
  • Preparation method of boron phosphide wear-resistant corrosion-resistant coating

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specific Embodiment approach 1

[0012] Specific embodiment one: the preparation method of the boron phosphide wear-resistant and corrosion-resistant coating in this embodiment is carried out according to the following steps:

[0013] Step 1, ultrasonically cleaning the stainless steel substrate with acetone, ethanol and deionized water in sequence;

[0014] Step 2. Place the stainless steel substrate processed in Step 1 on the heating table in the magnetron sputtering vacuum chamber, and then vacuumize the vacuum chamber until the vacuum degree reaches 1.0×10 -7 ~9.9×10 -7 Pa, start the heating device, heat it to 200-600°C and keep it warm for 10-30 minutes;

[0015] Step 3, then pass argon gas into the vacuum chamber until the pressure in the vacuum chamber is 3-5 Pa, and perform backsplash cleaning on the surface of the stainless steel substrate for 3-5 minutes;

[0016] Step 4. Then apply the sputtering power to start the ignition. The sputtering power is 120-160W, and the gas flow rate of argon gas is ...

specific Embodiment approach 2

[0017] Embodiment 2: This embodiment differs from Embodiment 1 in that: the heating temperature in step 2 is 550°C. Other steps and parameters are the same as in the first embodiment.

specific Embodiment approach 3

[0018] Embodiment 3: This embodiment is different from Embodiment 1 in that the sputtering power in Step 4 is 140W. Other steps and parameters are the same as in the first embodiment.

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Abstract

The invention relates to a preparation method of a boron phosphide wear-resistant corrosion-resistant coating, belonging to the field of wear-resistant corrosion-resistant coatings. The invention aims to solve the technical problem of short service life in the existing boron phosphide film preparation method. The method provided by the invention comprises the following steps: 1. ultrasonic cleaning; 2. putting a stainless steel substrate treated by the step 1 on a heating table in a magnetron sputtering vacuum bin, vacuumizing the vacuum bin until the vacuum degree reaches 1.0*10<-7>-9.9*10<-7>Pa, starting a heater to heat to 200-600 DEG C, and keeping the temperature for 10-30 minutes; 3. back washing; and 4. filming by using a high-purity boron target and pH 3 as reactants to obtain theboron phosphide wear-resistant corrosion-resistant coating. The boron phosphide film prepared by the method provided by the invention has the advantages of high hardness and modulus, favorable adhesiveness with the substrate, low residual stress, and low wear rate and long wear life in the frictional wear process.

Description

technical field [0001] The invention belongs to the field of wear-resistant and corrosion-resistant coatings; in particular, it relates to a preparation method of a boron phosphide wear-resistant and corrosion-resistant coating. Background technique [0002] Components such as screw propellers, shafts and submarine seals of ships not only require excellent mechanical properties to reduce wear during operation; more importantly, they can resist seawater corrosion in the nautical environment. However, a large amount of chloride ions in seawater is very destructive to stainless steel. Chloride ions can be preferentially adsorbed on the passive film of stainless steel, and combine with cations in the passive film to form soluble substances, thus causing destructive damage to stainless steel. corrosion. Therefore, depositing wear-resistant and corrosion-resistant coatings on stainless steel substrates is a feasible way to solve this problem. With its high hardness, high modulus...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C23C14/06C23C14/35C23C14/02
Inventor 朱嘉琦沈伟霞贾泽纯韩杰才王家智
Owner HARBIN INST OF TECH