An integrated surface plasmon refractive index sensor and its detection and analysis method
A surface plasmon and refractive index sensor technology, applied in the field of sensors, can solve problems such as low precision and application limitations, and achieve the effects of improved stability and reliability, high sensitivity, and easy use
- Summary
- Abstract
- Description
- Claims
- Application Information
AI Technical Summary
Problems solved by technology
Method used
Image
Examples
Embodiment 1
[0015] As shown in the accompanying drawings, the integrated surface plasmon refractive index sensor includes a substrate 1, which is a fused silica substrate, and the upper surface of the substrate 1 is covered with a layer coated by sputtering or electron beam evaporation. A film 2 supporting surface plasmon propagation, the thickness of the film 2 supporting surface plasmon propagation is 250 nm, and an oblique transverse slit 3 prepared by focused ion beam etching on the upper surface of the film 2 supporting surface plasmon propagation and twenty lateral surface plasmon excitation structures 4, the spacing L between the slit 3 and the surface plasmon excitation structures 4 0 is 67.7 μm, the angle between the inclined lateral side of the slit 3 and the lateral direction is the inclination angle α, and the inclination angle α is 2°, the number, surface shape and width of the above one or more lateral surface plasmon excitation structures 4 and depth enable the monochromati...
Embodiment 2
[0025] As shown in the accompanying drawings, the integrated surface plasmon refractive index sensor includes a substrate 1, which is a fused silica substrate, and the upper surface of the substrate 1 is covered with a layer coated by sputtering or electron beam evaporation. A film 2 supporting surface plasmon propagation, the thickness of the film 2 supporting surface plasmon propagation is 250 nm, and an oblique transverse slit 3 prepared by focused ion beam etching on the upper surface of the film 2 supporting surface plasmon propagation and twenty lateral surface plasmon excitation structures 4, the spacing L between the slit 3 and the surface plasmon excitation structures 4 0 is 107.7 μm, the angle between the inclined lateral side of the slit 3 and the lateral direction is the inclination angle α, and the inclination angle α is 1°, the number, surface shape and width of the above one or more lateral surface plasmon excitation structures 4 and depth enable the monochromat...
Embodiment 3
[0035] As shown in the accompanying drawings, the integrated surface plasmon refractive index sensor includes a substrate 1, which is a fused silica substrate, and the upper surface of the substrate 1 is covered with a layer coated by sputtering or electron beam evaporation. A film 2 supporting surface plasmon propagation, the thickness of the film 2 supporting surface plasmon propagation is 250 nm, and an oblique transverse slit 3 prepared by focused ion beam etching on the upper surface of the film 2 supporting surface plasmon propagation and twenty lateral surface plasmon excitation structures 4, the spacing L between the slit 3 and the surface plasmon excitation structures 4 0 is 127.7 μm, the angle between the inclined lateral side of the slit 3 and the lateral direction is the inclination angle α, and the inclination angle α is 1°, the number, surface shape and width of the above one or more lateral surface plasmon excitation structures 4 and depth enable the monochromat...
PUM
Property | Measurement | Unit |
---|---|---|
thickness | aaaaa | aaaaa |
thickness | aaaaa | aaaaa |
Abstract
Description
Claims
Application Information
- R&D Engineer
- R&D Manager
- IP Professional
- Industry Leading Data Capabilities
- Powerful AI technology
- Patent DNA Extraction
Browse by: Latest US Patents, China's latest patents, Technical Efficacy Thesaurus, Application Domain, Technology Topic, Popular Technical Reports.
© 2024 PatSnap. All rights reserved.Legal|Privacy policy|Modern Slavery Act Transparency Statement|Sitemap|About US| Contact US: help@patsnap.com