An integrated surface plasmon refractive index sensor and its detection and analysis method

A surface plasmon and refractive index sensor technology, applied in the field of sensors, can solve problems such as low precision and application limitations, and achieve the effects of improved stability and reliability, high sensitivity, and easy use

Inactive Publication Date: 2011-12-14
TSINGHUA UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

Among these four methods, angle scanning requires expensive precision angle rotation devices and control systems, wavelength scanning requires polychromatic light and expensive spectral analysis devices, and intensity modulation is affected by fluctuations in light source intensity and DC drift in photoelectric receivers and amplifier circuits. However, the accuracy is not high, and phase scanning requires additional modulation components, which limits their application to a certain extent.

Method used

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  • An integrated surface plasmon refractive index sensor and its detection and analysis method
  • An integrated surface plasmon refractive index sensor and its detection and analysis method
  • An integrated surface plasmon refractive index sensor and its detection and analysis method

Examples

Experimental program
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Effect test

Embodiment 1

[0015] As shown in the accompanying drawings, the integrated surface plasmon refractive index sensor includes a substrate 1, which is a fused silica substrate, and the upper surface of the substrate 1 is covered with a layer coated by sputtering or electron beam evaporation. A film 2 supporting surface plasmon propagation, the thickness of the film 2 supporting surface plasmon propagation is 250 nm, and an oblique transverse slit 3 prepared by focused ion beam etching on the upper surface of the film 2 supporting surface plasmon propagation and twenty lateral surface plasmon excitation structures 4, the spacing L between the slit 3 and the surface plasmon excitation structures 4 0 is 67.7 μm, the angle between the inclined lateral side of the slit 3 and the lateral direction is the inclination angle α, and the inclination angle α is 2°, the number, surface shape and width of the above one or more lateral surface plasmon excitation structures 4 and depth enable the monochromati...

Embodiment 2

[0025] As shown in the accompanying drawings, the integrated surface plasmon refractive index sensor includes a substrate 1, which is a fused silica substrate, and the upper surface of the substrate 1 is covered with a layer coated by sputtering or electron beam evaporation. A film 2 supporting surface plasmon propagation, the thickness of the film 2 supporting surface plasmon propagation is 250 nm, and an oblique transverse slit 3 prepared by focused ion beam etching on the upper surface of the film 2 supporting surface plasmon propagation and twenty lateral surface plasmon excitation structures 4, the spacing L between the slit 3 and the surface plasmon excitation structures 4 0 is 107.7 μm, the angle between the inclined lateral side of the slit 3 and the lateral direction is the inclination angle α, and the inclination angle α is 1°, the number, surface shape and width of the above one or more lateral surface plasmon excitation structures 4 and depth enable the monochromat...

Embodiment 3

[0035] As shown in the accompanying drawings, the integrated surface plasmon refractive index sensor includes a substrate 1, which is a fused silica substrate, and the upper surface of the substrate 1 is covered with a layer coated by sputtering or electron beam evaporation. A film 2 supporting surface plasmon propagation, the thickness of the film 2 supporting surface plasmon propagation is 250 nm, and an oblique transverse slit 3 prepared by focused ion beam etching on the upper surface of the film 2 supporting surface plasmon propagation and twenty lateral surface plasmon excitation structures 4, the spacing L between the slit 3 and the surface plasmon excitation structures 4 0 is 127.7 μm, the angle between the inclined lateral side of the slit 3 and the lateral direction is the inclination angle α, and the inclination angle α is 1°, the number, surface shape and width of the above one or more lateral surface plasmon excitation structures 4 and depth enable the monochromat...

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Abstract

The invention discloses an integrated surface plasma refractive index sensor and a detection and analysis method thereof. The planar size of the integrated surface plasma refractive index sensor is in microndimension so as to detect micro samples; furthermore, two interference arms are integrated on a thin film which supports surface plasma, so the stability and the reliability can be improved. Data of theoretical analysis and the embodiment show that the refractive index sensibility is improved with the increase of a distance L0 between an exciting structure of the surface plasma and a gap and the reduction of an inclination angle alpha, so that the sensitivity is high; furthermore, high-sensitivity and high optimal value function sensing can be realized, and the integrated surface plasma refractive index sensor has the characteristics of simple and compact structure, convenient use, wide applicability, low cost and favorability for integration and high-flux parallel sensing.

Description

technical field [0001] The invention belongs to the technical field of sensors, and in particular relates to an integrated surface plasmon refractive index sensor and a detection and analysis method thereof. Background technique [0002] Surface plasmon is usually a non-radiative space-localized electromagnetic surface wave mode propagating along the metal surface produced by free electrons on the metal surface collectively oscillating with the incident photons at the same frequency, and the field intensity decays negatively exponentially in the direction perpendicular to the interface . Under certain conditions, mutual coupling between light and surface plasmons in free space can be achieved. The use of surface plasmons as information carriers can enable effective excitation and flexible manipulation of light in the range of micrometers and even nanometers. Theoretical design, experimental research and practical application research of various devices based on surface pla...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01N21/45
Inventor 李晓炜谭峭峰白本锋金国藩
Owner TSINGHUA UNIV
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